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Optical detection device for detection of multiple flaws

An optical detection and defect technology, applied in the direction of optical test defects/defects, etc., can solve problems such as defects that are not enough to cope with the defects that should be inspected but not detected, and achieve the effect of improving the detection rate and reducing costs.

Active Publication Date: 2016-03-23
UTECHZONE CO LTD
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AI Technical Summary

Problems solved by technology

[0007] The above-mentioned previous technologies can effectively improve the detection efficiency and the detection rate of defects. However, when the above-mentioned prior technologies are actually tested, although they can have an excellent detection rate for specific defects, they are not enough to deal with it. All possible defects that should be detected but not detected on the surface of the object to be tested

Method used

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  • Optical detection device for detection of multiple flaws
  • Optical detection device for detection of multiple flaws
  • Optical detection device for detection of multiple flaws

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Embodiment Construction

[0073] Hereby give some preferred embodiments with regard to the structural features and operation methods of this case, and cooperate with illustrations, which will be described later to provide review and reference.

[0074] The present invention is an optical detection device for detecting multiple defects, which is used to detect surface defects on one or several visible planes of an object to be tested. The object to be tested can be a polyhedral structure with several visible planes, and the object to be tested can be, but not limited to, a chip, a wafer surface, an electronic packaging part, an electronic product casing, a substrate, or other similar common processed products.

[0075] see figure 1 , is a schematic diagram of the appearance of the first embodiment of the present invention, as shown in the figure:

[0076] The optical detection device 100 mainly includes a multi-axis robotic arm 40 (RoboticArm), a first optical detection station 10 , a second optical de...

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Abstract

An optical detection device for detection of multiple flaws comprises a multi-shaft mechanical arm, wherein the multi-shaft mechanical arm respectively moves an object to be detected to first, second and third optical detection stations for performing respective detection. The first optical detection station comprises a first image scanning device and a first auxiliary lighting device for providing uniform light. The second optical detection station comprises a second image scanning device and a second auxiliary lighting device for providing parallel surface coaxial light. The third optical detection station comprises a wired scanning camera and a third auxiliary lighting device for providing lateral line collimating light. The multi-shaft mechanical arm respectively moves the object to be detected to the first, second and third optical detection stations, and rotates or turns over the object to be detected to detect one or more visible planes of the object to be detected, so as to detect all flaws which possibly occur on the surfaces of the object to be detected and are difficult to detect, thereby effectively improving detection rate of products with flaws.

Description

technical field [0001] The invention relates to an optical detection device, especially an optical detection device capable of detecting various surface defects. Background technique [0002] The development of automatic control technology can be seen from the concept of mass production. Mass production is the abbreviation of Mass Production. Its concept appeared in human society very early, and it has the advantages of low cost and high efficiency. However, the implementation of mass production is subject to standardized prerequisites. Before standardization can be achieved, the objects of mass production are limited to low-tech, low-precision industries, such as simple products such as bricks and glass. With the popularization of standardization and the finer division of labor, the objects that can be processed in mass production also increase at the same time. However, following the high-standard requirements brought about by the precision industry, the quality of prod...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/89
Inventor 邹嘉骏方志恒蔡维育
Owner UTECHZONE CO LTD
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