Optical detection device for detection of multiple flaws
An optical detection and defect technology, applied in the direction of optical test defects/defects, etc., can solve problems such as defects that are not enough to cope with the defects that should be inspected but not detected, and achieve the effect of improving the detection rate and reducing costs.
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[0073] Hereby give some preferred embodiments with regard to the structural features and operation methods of this case, and cooperate with illustrations, which will be described later to provide review and reference.
[0074] The present invention is an optical detection device for detecting multiple defects, which is used to detect surface defects on one or several visible planes of an object to be tested. The object to be tested can be a polyhedral structure with several visible planes, and the object to be tested can be, but not limited to, a chip, a wafer surface, an electronic packaging part, an electronic product casing, a substrate, or other similar common processed products.
[0075] see figure 1 , is a schematic diagram of the appearance of the first embodiment of the present invention, as shown in the figure:
[0076] The optical detection device 100 mainly includes a multi-axis robotic arm 40 (RoboticArm), a first optical detection station 10 , a second optical de...
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