A method of improving the control accuracy of the coil current driver of the maglev planar motor

Abstract

The invention discloses a method for improving the control accuracy of the coil current driver of a maglev planar motor. According to the temperature distribution model of each circle of the moving iron type maglev planar motor line in the working process, the real-time resistance value of the planar motor coil is calculated, and the real-time resistance value of the coil is passed. The parameter variables of the PI controller are calculated to regulate the output of the PI controller. The present invention solves the limitations of the above-mentioned existing moving iron type magnetic levitation planar motor, and provides a real-time adjustment method of control parameters for the moving iron type magnetic levitation planar motor coil current driver according to the temperature distribution model of the moving iron type magnetic levitation planar motor coil during the working process, Improve coil current drive loop control performance.

Description

technical field [0001] The invention relates to the field of motors, in particular to a method for improving the control accuracy of a coil current driver of a magnetic levitation planar motor. Background technique [0002] The moving iron magnetic levitation planar motor can greatly simplify the planar motion mechanism and reduce the moving mass. The mover does not generate heat and has no cable pipeline interference. It can realize high-speed precision motion without friction and wear. It is the current research on large-stroke precision motion systems. Hotspot, whose structure is as follows figure 1 shown. Since the magnetic levitation motor is a 6-degree-of-freedom levitation motion and is driven by multi-coil redundancy, its decoupling control calculation is very complicated. The control accuracy of the maglev platform used in the field of IC manufacturing equipment is required to reach the submicron or even nanometer level. In order to obtain high control characteri...

AI Technical Summary

Problems solved by technology

Because the water cooling device can only reduce the surface temperature of the coil, but cannot effectively reduce the internal temperature of the coil, this method cannot completely prevent the temperature rise of the motor during operation.

[0003] The first problem caused by the temperature rise of the magnetic levitation motor is the change of the gain of the controlled object in the current loop. According to the temperature-resistivity of copper, when the coil temperature rises by 50°C, its internal resistance will increase by 20%, and the controlled object gain is within 20%. The change of the servo gain has little effect on the system control performance, and it is difficult to find a set of fixed servo gains to adapt to such a change range when the gain amplitude changes more than 20%.

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