Selfcalibration of Capacitive Pressure Sensors with Electrostatic Forces

Abstract

The present invention relates to a selfcalibration of capacitive pressure sensors with electrostatic forces. A pressure sensor calibration system comprises one or more pressures sensors for calibrating sensor parameters based on a membrane deflection or a membrane displacement from an electrostatic force. A measuring component measures capacitance values corresponding to applied voltages at the electrodes of the one or more pressure sensors. Sensor parameters are derived from capacitance measurements and a pressure measurement, which are utilized by a calibration component for calibration and recalibration of the one or more pressure sensors.

Description

technical field [0001] The present disclosure relates to the field of pressure sensors, and more particularly to the calibration and recalibration of pressure sensors using one or more electrostatic forces. Background technique [0002] Capacitive pressure sensors use a movable diaphragm and a pressure cavity to create a variable capacitor. A variable capacitor exhibits a capacitance that changes corresponding to the force induced by the measured pressure. For integration of sensor units into electronic devices, these sensor units are usually connected to form arrays or bridges, however from a system point of view the network of units still behaves like a single sensor. Initially at the end of the manufacturing process or manufacturing line, the sensor is usually calibrated under defined measurement conditions. This calibration and further recalibration may include various pressures at different temperatures, which would utilize specialized test equipment and significant t...

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Problems solved by technology

This calibration and further recalibration can include a variety of different pressures at different temperatures, using specialized test equipment and significant test time

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