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Fine-tunable microscopic inspection device for repairing micro-defects of large-aperture curved optical components

A technology for optical components and microscopic inspection, which is applied in optical testing of flaws/defects, measuring devices, and material analysis through optical means. It can solve problems such as poor positioning accuracy, achieve high precision, ensure stability, and high efficiency Effect

Active Publication Date: 2017-11-17
HARBIN INST OF TECH +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The present invention aims to solve the problem of poor positioning accuracy of rapid identification of micro-defects on the surface of large-diameter optical elements

Method used

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  • Fine-tunable microscopic inspection device for repairing micro-defects of large-aperture curved optical components
  • Fine-tunable microscopic inspection device for repairing micro-defects of large-aperture curved optical components
  • Fine-tunable microscopic inspection device for repairing micro-defects of large-aperture curved optical components

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Experimental program
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specific Embodiment approach 1

[0026] Specific implementation mode one, combination figure 1 with figure 2 This embodiment will be described. The fine-tunable micro-detection device for repairing micro-defects of large-diameter curved optical elements according to this embodiment includes a dark field detection unit, a bright field monitoring unit, a spectral confocal precision ranging unit and a micro system Mounting board 1;

[0027] The spectral confocal precise ranging unit includes a spectral confocal range finder 2, an optical X-axis precision fine-tuning sliding table 3, a ranging transition plate 4, a ranging V-block fixture 5, and a ranging clamping device 6;

[0028] The bottom surface of the optical X-axis precision fine-tuning slide 3 is fixed on the upper surface of the micro system mounting board 1, and the optical X-axis precision fine-tuning slide 3 is fixedly connected to the lower surface of the distance measuring transition plate 4 by screws, and the upper surface of the distance measuring tra...

specific Embodiment approach 2

[0043] Embodiment 2 This embodiment is a further description of the fine-tunable microscopic inspection device for repairing micro-defects of large-diameter curved optical elements described in Embodiment 1. The distance measuring clamping device 6, the bright field clamping device 11 The structure of the dark field clamping device 17 is the same, and the distance measuring clamping device 6 is taken as an example for description. The distance measuring clamping device 6 includes a pre-tightening pressing block 61, a pre-tightening pressing piece 62, a pre-tightening base 63, Pre-tightening the cover 64 and adjusting the flat head screw 65;

[0044] The upper surface of the pre-compression block 61 is provided with two circular through holes. The circular through-holes are provided at both ends of the pre-compression block 61 for the two cylinders to pass through. A gap is provided between the blocks 61, and two clamping screws are provided on the sides of the two circular throug...

specific Embodiment approach 3

[0046] Embodiment 3 This embodiment is a further description of the fine-tunable microscopic inspection device for repairing micro-defects of the aperture curved optical element described in the first embodiment, and it also includes a transverse fixing plate 18 and a longitudinal fixing plate 19. The horizontal fixing plate 18 is arranged horizontally, and the lower end of the horizontal fixing plate 18 is provided with mounting feet, and the mounting feet fix the horizontal fixing plate 18 on the upper surface of the micro system mounting board 1 by screws, and the vertical fixing plate 19 is arranged vertically. The bottom edge of the vertical fixing plate 19 is fixedly connected to the upper surface of the horizontal fixing plate 18 by screws. The dark field light source 16 is fixed on the horizontal fixing plate 18 and located in the area enclosed by the horizontal fixing plate 18 and the vertical fixing plate 19.

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Abstract

The invention relates to a curved surface micro-defect detection apparatus, and concretely relates to a fine-tunable microscopic detection apparatus for large-aperture curved surface optical element micro-defect restoration. The problem of poor positioning accuracy of rapid identification of micro-defects on the surface of a large-aperture optical element is solved. A dark field detection unit carries out full-aperture scanning on all defects on the curved surface of a fused quartz optical element, processes the scanned micro-defect image, and determines the dimensions of micro-defect points and the coordinate positions of the micro-defect points on the surface of the optical element; a bright field monitoring unit monitors the micro-defect points processed by the dark field detection unit in real time to observe practical dimensions of the defect points; and a spectral confocal range finding unit measures a distance between the fine-tunable microscopic detection apparatus and the surface of the curved surface optical element to realize Z-directional accurate positioning of any micro-defect point on the surface. The apparatus is suitable for being used in optical element micro-defect restoration.

Description

Technical field [0001] The present invention relates to a curved surface micro defect detection device. Background technique [0002] Large-aperture fused silica optical components, with their excellent optical performance, play a very important role in laser fusion devices as the core optical components for strong laser output. However, during ultra-precision machining and high-energy laser targeting of fused silica optical components, the surface is prone to cracks, pits, ablation points and other micro-defects on the order of tens of microns to sub-millimeters. These micro-defects will cause a sharp drop in the laser damage threshold of the fused silica optical element. In the subsequent high-energy laser targeting process, the size of the micro-defects will increase sharply, and ultimately lead to the destruction of the entire optical element. Because the size of micro-defects is too small, and it needs to be identified and located for laser repair in the subsequent process,...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/01G01N21/95
Inventor 陈明君赵林杰王海军郑万国廖威袁晓东廖然
Owner HARBIN INST OF TECH
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