A three-dimensional flow rate change rate sensor and measurement method based on flexoelectric effect
A flexoelectric effect and rate of change technology, applied in the field of sensors, can solve problems such as environmental threats and small effective components, and achieve the effects of good real-time performance, fast response speed and light weight
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[0048] The present invention will be described in further detail below in conjunction with the accompanying drawings and specific embodiments.
[0049] Such as figure 1 , figure 2 and image 3 As shown, a three-dimensional flow velocity change rate sensor based on the flexoelectric effect of the present invention includes an L-shaped three-dimensional main body element 1, one end of the L-shaped three-dimensional main body element 1 is consolidated on the substrate, and the other end is connected to a spherical insulating material 2, The L-shaped three-dimensional main body element 1 includes an L-shaped hollow cavity insulating layer 3, which runs through the flexoelectric material layer 3-1 arranged inside the L-shaped hollow cavity insulating layer 3, wherein the length of the flexoelectric material layer 3-1, The width and height are smaller than the length, width and height of the hollow cavity of the L-shaped hollow cavity insulating layer 3; in a section inside the L...
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