Integrated device of awg output waveguide and waveguide detector and its preparation method

Abstract

The invention provides an AWG output waveguide and waveguide detector integration device and a preparation method thereof. The integration device comprises a substrate, an AWG output waveguide and a waveguide detector, and is characterized in that the AWG output waveguide is strip-shaped and located in an AWG area on the substrate, the AWG output waveguide comprises an AWG lower covering layer, an AWG core layer and an AWG upper covering layer from the bottom up, and the AWG lower covering layer and the AWG core layer extend to a PD area; and the waveguide detector is formed above the AWG cover layer of the PD area on the substrate and is arranged opposite to the AWG output waveguide, and the waveguide detector comprises a PD lower contact layer, a PD absorbing layer and a PD upper contact layer from the bottom up. According to the invention, light transmitted in the AWG output waveguide is coupled to the PD absorbing layer of the waveguide detector layer by layer from the AWG core layer in a mode of evanescent field coupling from the bottom up, thereby avoiding excessive coupling loss in interconnection of discrete devices, and improving the energy efficiency in an optical link by using evanescent field coupling.

Description

technical field [0001] The invention relates to the field of optoelectronic devices and their integration, in particular to an integrated device of an AWG output waveguide and a waveguide detector and a preparation method thereof. Background technique [0002] The emergence of various information networks covering the whole world marks the entry of human beings into the information society. With the development of society, people's demand for information services is increasing day by day, and correspondingly, the bandwidth of the communication system is required to increase continuously. In order to meet the increasing transmission traffic in the world, the process of intelligent optical network characterized by all-optical information processing and information service broadband represented by fiber-to-the-home is accelerating. A new generation of optical fiber communication evolution with integration, low cost and high reliability. The wavelength division multiplexing (W...

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Problems solved by technology

[0004] In the process of realizing the present invention, the applicant found that in the prior art, the AWG output waveguide and the waveguide detector are set separately, the stability of the system is poor, and the coupling energy consumption is high, which affects the application of the two in the field of optical communication.

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