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Bonding structure and forming method thereof

A bonding structure and bonding layer technology, which is applied in the direction of electrical components, electric solid devices, circuits, etc., can solve the problems of poor mechanical strength of the bonding layer

Active Publication Date: 2015-11-25
SEMICON MFG INT (SHANGHAI) CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0009] The present application aims to provide a bonding structure and its forming method to solve the problem of poor mechanical strength of the bonding layer of the bonding structure in the prior art

Method used

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Embodiment Construction

[0032] It should be noted that, in the case of no conflict, the embodiments in the present application and the features in the embodiments can be combined with each other. The present application will be described in detail below with reference to the accompanying drawings and embodiments.

[0033] It should be noted that the terminology used here is only for describing specific implementations, and is not intended to limit the exemplary implementations according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should also be understood that when the terms "comprising" and / or "comprising" are used in this specification, it indicates There are features, steps, operations, means, components and / or combinations thereof.

[0034] For the convenience of description, spatially relative terms may be used here, such as "on ...", "over ...", "on the surface of ..."...

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Abstract

The application discloses a bonding structure and a forming method thereof. The bonding structure comprises a bonding layer. The bonding layer comprises a bonding metal and a grain refinement material. The grain refinement material is used for refining the bonding metal. The application is aimed at solving the problem that the mechanical strength of a bonding layer is poor in terms of the prior art, and the bonding layer of the invention comprises the bonding metal and the grain refinement material for refining bonding metal grains. In this way, grain refinement of the bonding metal is achieved, the mechanical strength of the bonding layer is improved, the structure of the bonding layer is more stable, and the bonding layer of the bonding structure is effectively prevented from loosening and falling.

Description

technical field [0001] The present application relates to the technical field of integrated circuits, and in particular, relates to a bonding structure and a forming method thereof. Background technique [0002] Wafer bonding technology is to make two pieces of homogeneous or heterogeneous materials with clean surface and atomic level roughness after surface cleaning and activation treatment, without using any adhesive substances, and directly bond them into one under certain conditions. Van der Waals forces, molecular forces, and even atomic forces combined. This wafer bonding technology is realized by using a bonding structure, which can be understood as a connection element. . [0003] Wafer bonding technology has great advantages. The interface obtained by this technology has the advantages of firmness, smoothness and optical transparency. This interface is of great significance for the innovation of optical devices. [0004] In the existing technology, such as figur...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L23/488H01L21/60
Inventor 周鸣
Owner SEMICON MFG INT (SHANGHAI) CORP
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