A moems vector hydrophone

Abstract

A MOEMS vector hydrophone, comprising: optical fiber (1), optical fiber collimator (2), base (3), silicon-based frame (4), cantilever beam (5) and miniature cylinder (6); silicon A cantilever beam (5) is erected in the center of the base frame (4) and installed in the base (3); the fiber collimator (2) is installed in the mounting hole (32) of the base (3), and cantilever beam (5) F-P cavity (16) is formed between the corresponding platforms (51) on the top; the miniature cylinder (6) is installed on the platform (51) at the "cross" intersection of the cantilever beam (5), and one end of the optical fiber (1) is connected to the optical fiber The collimator (2) is connected, and the other end is connected to an external optical path demodulation device. The invention performs sound-machine-light conversion through the F-P cavity, uses MOEMS technology to combine MEMS technology and optical fiber sensing technology, meets the requirements of miniaturization, low power consumption, and anti-electromagnetic interference, and realizes the passive front end of the hydrophone , to achieve high sensitivity and high resolution detection of weak acoustic signals.

Description

technical field [0001] The invention relates to a vector hydrophone in the field of MOEMS sensing. Background technique [0002] Vector hydrophone, as a sensor capable of time synchronization and space co-point measurement of underwater sound field vector information, has a wide application prospect in ocean engineering and ocean development. At present, the vector hydrophone is more common in the same vibration type. For example, the Chinese invention patent No. ZL200910072009.2 discloses a "three-dimensional vector hydrophone based on piezoelectric velocity sensor", which consists of three The piezoelectric speed sensor is connected sequentially by connecting rods, and picks up the acoustic signal by synchronously vibrating with the water particle. In the application process of the vector hydrophone, it was found that in order to ensure the low-frequency sensitivity of the co-vibration piezoelectric vector hydrophone, as the frequency decreases, the volume becomes larger ...

AI Technical Summary

Problems solved by technology

However, no matter the co-vibration piezoelectric vector hydrophone or the single-vector hydrophone developed by MEMS technology, they are all active devices, which require power supply when used, and are susceptible to electromagnetic interference, especially when electrical signals are transmitted over long distances. The medium attenuation is serious, and the interference of electromagnetic noise on the signal is serious, resulting in the defects of low signal-to-noise ratio and poor anti-interference of the hydrophone

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