Grinding device

Abstract

A subject of this invention is to provide a grinding device that provides a more effective way to supply grinding fluid to a processing area as compared to a conventional method. The grinding device includes a holding platform that holds a to-be-processed object, a grinding mechanism that grinds the to-be-processed object held in this way and a grinding fluid supplying means that supplies grinding fluid to the to-be-processed object and a grinding stone. The grinding fluid supplying means includes a grinding fluid supplying port and an upper wall section. The grinding fluid supplying port supplies the grinding fluid onto an upper surface of the to-be-processed object from a position closer to a rear side of a rotating direction of the holding platform than a processing area where the to-be-processed object is processed by the grinding stone. The upper wall section, which is set between the grinding fluid supplying port and the grinding stone in the processing area and has predetermined intervals with respect to the upper surface side of the to-be-processed object, makes the grinding fluid flow while the holding platform is rotating to form a grinding fluid supplying layer around the processing area. As a result, the grinding fluid supplying layer can be used to shield a gas layer generated around the grinding stone in rotation to thereby effectively supply the grinding fluid to the processing area.

Description

technical field [0001] The present invention relates to a grinding device for grinding a workpiece. Background technique [0002] A grinding device that grinds a workpiece includes at least: a holding table that holds the workpiece; a grinding member that has a ring-shaped grinding wheel on which a grinding tool is fixed; and a grinding fluid supply member that It supplies the grinding fluid to the workpiece and the grinding tool, and presses the upper surface of the workpiece by the grinding tool while supplying the grinding fluid to the upper surface of the workpiece by means of the grinding fluid supply member. objects for grinding. In such a grinding device, since grinding is performed by supplying grinding liquid between the upper surface of the workpiece and the grinding wheel by utilizing the grinding liquid supply member, it is possible to grind the grinding wheel in use. Removal of grinding chips generated when the workpiece is processed. In addition, by supplyin...

AI Technical Summary

Problems solved by technology

[0006] However, when the workpiece is ground in the above-mentioned grinding device, there is a problem that an air layer is formed around the grinding tool due to the rotation of the grinding tool, which makes it difficult for the grinding fluid to reach the workpiece. Grinding abrasives, in addition, there is also the following problem: the grinding fluid that collides with the rotating grinding abrasives is scattered to the surroundings, so that the grinding fluid cannot be efficiently supplied to the above-mentioned processing area. As a result, the grinding Chips contained in the cutting fluid are scattered and attached to the workpiece

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