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A comparative anti-interference micro-movement angle mirror laser interferometer, calibration method and measurement method

A technology of laser interferometer and corner reflector, which is applied in measurement devices, instruments, optical devices, etc., can solve problems such as poor anti-environmental interference ability

Active Publication Date: 2017-12-05
润希乐生物科技(扬州)有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] The purpose of the present invention is to provide a laser interferometer capable of resisting environmental interference in view of the shortcomings of current laser interferometers that are poor in anti-environmental interference

Method used

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  • A comparative anti-interference micro-movement angle mirror laser interferometer, calibration method and measurement method
  • A comparative anti-interference micro-movement angle mirror laser interferometer, calibration method and measurement method

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Experimental program
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Effect test

Embodiment 1

[0042] Embodiment 1, a comparative anti-interference micro-movement corner mirror laser interferometer, including a laser source 1, a micro-movement corner mirror 2, an interferometric photodetector 4, a moving corner mirror 3, a beam splitter group 5 and a micro-motion Platform 10, the micro-movement angle reflector 2 is arranged on the micro-motion platform 10, the laser beam emitted by the laser source 1 is divided into the first laser beam 7 and the second laser beam after the beam splitter group 5 8. The first laser beam 7 shoots to the micro-movement angle reflector 2, and then shoots to the beam splitter group 5 after being reflected by the micro-motion angle mirror 2, and then shoots to the beam splitter group 5 after passing through the beam splitter group 5. The interferometric photodetector 4, the second laser beam 8 shoots to the moving angle reflector 3, is reflected by the moving angle reflector 3 and then shoots to the beam splitter group 5 again, and then shoots...

Embodiment 2

[0047] Embodiment 2, as shown in the figure, a calibration method for a laser interferometer with a contrastive anti-interference micro-movement corner mirror, including the following steps:

[0048] Step 1. Position adjustment: Adjust the positions of the laser source 1, the micro-movement angle mirror 2, the beam splitter group 5, the interferometric photodetector 4, the reflection measurement photodetector 6, the moving corner mirror 3 and the micro-motion platform 10 ;

[0049] Step 2, adjust the optical path: start the laser source 1, and further precisely adjust the micro-movement angle reflector 2, the beam splitter group 5, the interferometric photodetector 4, the reflection measurement photodetector 6, the moving angle reflector 3 and the micro-motion The position of the platform 10 makes the optical path of the laser interferometer meet the design requirements;

[0050] Step 3, generate the strongest interference database: control the movement of the micro-motion pl...

Embodiment 3

[0055] Embodiment 3, a measurement method using a comparative anti-interference micro-movement corner mirror laser interferometer and a calibration method:

[0056] In the actual measurement environment, suppose the signal reading measured by the reflection measurement photodetector 6 is x, the signal reading obtained by the interferometric photodetector 4 measurement is y, and the x value and the y value are stored in the strongest interference database , the weakest interference database, and the 1 / n wavelength interference database for comparison. When the x value and y value match a certain set of values ​​in the strongest interference database, this position is considered to be the strongest constructive interference position. When The x value and y value match a set of values ​​in the weakest interference database, and this position is considered as the weakest destructive interference position. When the x value and y value match a set of values ​​in the 1 / n wavelength in...

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Abstract

The invention relates to the field of precision test technologies and instruments, and particularly relates to a contrast type anti-interference micro-motion corner reflector laser interferometer, a calibration method and a measurement method. The contrast type anti-interference micro-motion corner reflector laser interferometer comprises a laser source, a micro-motion corner reflector, an interference measurement photoelectric detector, a movable corner reflector, a beam splitter group and a micro-motion platform, wherein the micro-motion corner reflector is arranged on the micro-motion platform. The contrast type anti-interference micro-motion corner reflector laser interferometer is characterized by further comprising a reflection measurement photoelectric detector. A laser beam is reflected to the beam splitter group by the movable corner reflector and then forms a reflected laser beam, and the reflected laser beam shots to the reflection measurement photoelectric detector. According to the laser interferometer provided by the invention, the reflection measurement photoelectric detector can measure the intensity of the laser beam reflected by the movable corner reflector, and the interference state of a laser interference beam is determined according to the intensity of the reflected laser beam, thereby realizing a purpose of resisting environmental interference.

Description

technical field [0001] The invention relates to the field of precision testing technology and instruments, in particular to a contrasting anti-interference micro-movement angle mirror laser interferometer, a calibration method and a measurement method. Background technique [0002] The emergence of lasers has enabled the rapid development of ancient interferometric technology. Lasers have the characteristics of high brightness, good directionality, monochromaticity and good coherence. Laser interferometry technology has been relatively mature. Laser interferometry system is widely used: measurement of precision length and angle, such as detection of linear scale, grating, gauge block, and precision screw; positioning detection system in precision instruments, such as control and correction of precision machinery; special purpose for large-scale integrated circuits Positioning detection systems in equipment and testing instruments; measurement of tiny dimensions, etc. At pre...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B9/02
Inventor 张白郑华赵霞
Owner 润希乐生物科技(扬州)有限公司
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