Conical space compression plasma detection system
A plasma and space compression technology, applied in the field of detection systems, can solve the problems of insufficient detection lower limit and increased detection difficulty, and achieve the effect of improving traditional plasma detection
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[0024] In order to further understand the features, technical means, and specific objectives and functions achieved by the present invention, and analyze the advantages and spirit of the present invention, the present invention will be further explained through the following examples.
[0025] The present invention proposes a design scheme of the plasma detection system, and provides an inspection method with a lower detection limit.
[0026] For the structural diagram of the example of the present invention, see the attached figure 1 , The schematic diagram of the conical compressed plasma is figure 2 , The lower end is connected with the Yangping module (3), the side is connected with the detection module (5), and the inner wall X is highly reflective with a wavelength of 150-450 nm.
[0027] The present invention patent mainly consists of seven parts: light source module (1), cone compression module (2), sample module (3), control module (4), detection module (5), logic module (6...
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