A three-degree-of-freedom large-stroke flexible nanopositioning platform

Abstract

The invention discloses a three degree-of-freedom large travel flexible nano positioning platform, which comprises a fixed base, wherein a motion platform is set on the fixed base; the motion platform comprises a basic base; a terminal platform is set in the middle of the basic base; the motion platform also comprises four X direction flexible decoupling members that are in centrosymmetric distribution and four Y direction flexible decoupling members that are incentrosymmetric distribution; and an X direction driver X1, an X direction driver X2, a Y direction driver Y1 and a Y direction driver Y2 are respectively set inside the second X direction flexible decoupling member, the fourth X direction flexible decoupling member, the first Y direction flexible decoupling member and the third Y direction flexible decoupling member. According tot he invention, the structure is compact; and a voice coil motor driver is adopted inside a double-level Phi-shaped plate spring, thus the size of the whole nano flexible platform is greatly reduced, and the occupying proportion of the output space and the platform space is greatly increased.

Description

technical field [0001] The invention relates to the technical field of micro-nano control and high-precision positioning, in particular to an XYθ three-degree-of-freedom precision positioning platform. Background technique [0002] Micro-nano positioning technology is playing an increasingly important role in precision engineering applications, especially in nanoimprint lithography, atomic force microscopy, chip manufacturing, biomedical engineering and other fields. At the same time, with the deepening of research in these fields, higher and higher requirements are put forward for nanopositioning technology, and the demand for nanopositioning platforms with large stroke, high resolution and multiple degrees of freedom is becoming more and more vigorous. The current positioning platform mainly has the following shortcomings: [0003] 1. Existing nanopositioning platforms are often designed with a small stroke, mostly driven by piezoelectric ceramics, and the output displace...

AI Technical Summary

Problems solved by technology

[0003] 1. Existing nano-positioning platforms are often designed with small strokes, mostly driven by piezoelectric ceramics, and the output displacement is concentrated at 0.01mm to 0.1mm, which cannot achieve centimeter-level large strokes

[0004] 2. The micro-displacement positioning platform with an amplification mechanism often has an unstable output amplification ratio due to material deformation, which affects positioning accuracy and control

[0005] 3. The resolution of the traditional large-stroke positioning platform is often relatively low. For example, using a servo motor or a stepping motor to drive a ball screw positioning platform can achieve a large stroke, but due to friction and other reasons, defects such as crawling and low resolution often occur

[0006] 4. Most of the existing positioning platforms are designed on the plane xy two degrees of freedom, which cannot realize precise rotation in the z direction

[0007] 5. The traditional multi-degree-of-freedom parallel nano-positioning platform has serious displacement coupling phenomenon, which affects the positioning accuracy

[0008] 6. Traditional multi-degree-of-freedom parallel micro-displacement platforms mostly use the same number of drivers as the output degrees of freedom, which makes it difficult to compensate for processing problems that arise

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