A-directional sapphire mobile phone cover plate polishing solution and preparation method thereof
A technology for sapphire and mobile phone covers, applied in polishing compositions containing abrasives, etc., can solve the problems of low removal rate and poor surface quality, and achieve the effect of eliminating scratches
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Embodiment 1-5
[0030] Under the action of mechanical stirring, the silica sol was added into deionized water to disperse and dilute, then sequentially added polishing aids, complexing agents, surfactants, and defoamers, and used a pH regulator to adjust the pH value of the polishing solution, specifically See Table 1 for the ratio.
[0031] Table 1. Each group distribution ratio in embodiment 1-5
[0032]
[0033] Use the above polishing solution to perform chemical mechanical polishing on the A-direction sapphire mobile phone cover. The process conditions are shown in Table 2:
[0034] Table 2. The processing conditions of embodiment and comparative example
[0035] polisher
HAMAI-16B (double-sided)
Disk Size(mm)
1160
polishing pad
SUBA 800
speed(rpm)
35
[0036] Pressure (g / cm 2 )
300
Polishing liquid flow rate (L / min)
1
Polishing time (min)
150
Workpiece to be processed
5.5 inch sapp...
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