Piezoelectric two-dimensional series small-volume workbench

Abstract

The invention discloses a piezoelectric-type two-dimension series small-volume workbench. The piezoelectric-type two-dimension series small-volume workbench comprises a platform base, a connecting block, a first parallelogram amplifying mechanism, a second parallelogram amplifying mechanism and a moving block; the first parallelogram amplifying mechanism is located on the platform base, the second parallelogram amplifying mechanism is in series connection with the first parallelogram amplifying mechanism through the connecting block, the second parallelogram amplifying mechanism and the first parallelogram amplifying mechanism are arranged in an orthogonally perpendicular mode, and the second parallelogram amplifying mechanism is connected with the moving block simultaneously; any one of the first parallelogram amplifying mechanism and the second parallelogram amplifying mechanism comprises a parallelogram amplifying mechanism body, a pre-tension jackscrew, a piezoelectric ceramic actuator, a tungsten steel, a steel roll ball and a plugging. The piezoelectric-type two-dimension series small-volume workbench avoids the coupling error generated in the moving process, and the fact that a larger displacement is output on the premise of a compacter structure is achieved by the adoption of the parallelogram amplifying mechanisms.

Description

technical field [0001] The invention relates to the field of micro-drive technology, in particular to a piezoelectric two-dimensional serial small-volume workbench. Background technique [0002] At present, the advantages of piezoelectric ceramic actuators have been widely recognized and applied. Piezoelectric ceramic actuators use the inverse piezoelectric effect of piezoelectric materials to work, and can be driven only by the magnitude of the external electric field, which overcomes the inertia of previous mechanical, hydraulic, pneumatic, electromagnetic actuators, etc. Large size, slow response, complex structure, poor reliability, etc. It has the advantages of small size, compact structure, no mechanical friction, no gap, high resolution, fast response, no heat generation, no magnetic field interference, and can be used in low temperature and vacuum environments. It is widely used in micro-positioning technology. For example, precise positioning of objective lens, lo...

AI Technical Summary

Problems solved by technology

However, the existing precision positioning devices have problems such as too large volume, too small stroke, insufficient positioning accuracy, and slow response time.

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