Combined ionization source based on vacuum ultraviolet lamp and discharge ionization
A technology of vacuum ultraviolet lamp and ionization source, which is applied in the field of mass spectrometry ion source, can solve the problems of limited application range, low sensitivity of vacuum ultraviolet lamp, low power consumption, etc., and achieves the effects of high discharge efficiency, favorable ionization, and low energy consumption
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[0024] figure 1 The middle capillary A1 has a length of 1 mm and an inner diameter of 100 μm, and the capillary B3 has a length of 0.2 m and an inner diameter of 250 μm. The cavity 4 is maintained at a vacuum of 0.1Pa-50Pa by a molecular pump. The air pressure of the discharge chamber 2 is 600pa. Place the capillary A1 in the He gas, under the action of the air pressure difference, the He gas reaches the discharge chamber 2 through the capillary A1, and then reaches the ionization region 5 of the chamber 4 through the capillary B3.
[0025] When a high radio frequency voltage (frequency 25KHz, peak-to-peak value 3000V) is applied on the electrode head 8 of the discharge chamber 2, the He gas in the discharge chamber 2 will generate a discharge, generating a large number of ions and electrons. Since the air pressure of the chamber 4 is lower than the air pressure of the discharge chamber 2 . The ions in the discharge chamber 2 reach the ionization region 5 of the chamber 4 t...
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