A Vacuum Optical Experimental System with a Fine-tuning Mechanism Outside the Cabin

Abstract

A vacuum optical experiment system with a fine-tuning mechanism outside the cabin of the present invention has: the first support frame of the air pumping device and the second support frame of the vacuum chamber are placed at the positions corresponding to the vertical surface of the vibration isolation platform, and the upper end of the first support frame is placed The air extraction device; the vacuum chamber is placed on the upper end of the second support frame; the vibration isolation platform is placed on each air spring; the lower end surface of each air spring is placed on the ground; the pad and the external adjustment device are located on the vibration isolation platform; the light source 1. The ultraviolet monochromator is located on the corresponding pad; the suction port of each vacuum pump is connected to the corresponding suction port of the suction device, vacuum tube and vacuum chamber; the light source, suction device, ultraviolet monochromator, connecting devices and vacuum The connection port of the cabin is connected to the port of the corresponding vacuum tube; the external connection part of the external adjustment device is connected to the vibration isolation platform; the connection end of the internal connection part is connected to the vacuum cabin through a bellows, and the optical structure to be tested is connected to the inside of the cabin. The internal connection is used to adjust the optical structure under test to move in the vacuum chamber outside the vacuum chamber.

Description

technical field [0001] The invention belongs to the technical field of optical experiment and optical detection, and relates to a vacuum optical experiment system with an external fine-tuning mechanism. Background technique [0002] When the optical system is working or optical detection, it is necessary to work or experiment in a vacuum environment due to the light transmission ability or the sensitivity to the influence of airflow. In general, the relative positional relationship of the optical components in the optical system is strictly required, and the precision is high, so the adjustment process and results are very critical. However, the cavity of the vacuum system brings troubles to the installation and adjustment. Before and after the vacuum is formed, the mechanical environment of the optical structure changes. If the optical components cannot continue to maintain the original relative positional relationship, the optical system may not work, and the optical detec...

AI Technical Summary

Problems solved by technology

Generally used vacuum pumps have large vibrations, while the selection of vacuum pumps with small vibrations is limited in application

For example, although the plasma pump has no vibration, the pumping speed is small and there is saturation

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