Capacitance type micro-ultrasonic sensor ring array with oval diaphragm unit structure and circuit system thereof
A technology of ultrasonic sensor and structural capacitance, which is applied in the direction of ultrasonic/sonic/infrasonic Permian technology, ultrasonic/sonic/infrasonic diagnosis, ultrasonic/sonic/infrasonic image/data processing, etc., which can solve the problem of low receiving sensitivity and affecting blood vessels Endoscopic imaging detects problems such as imaging range, imaging quality, and small scanning area of the circular diaphragm to achieve the effect of expanding the imaging range, preventing stress concentration effects, and increasing the scanning area
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Embodiment 1
[0040] The present invention proposes a capacitive micro-ultrasonic sensor annular vascular endoscopic imaging array with an elliptical membrane secondary array as the working unit, see Figure 4 , comprising: an elliptical membrane secondary array 16,
[0041] Among them, see Figure 5 The elliptical membrane secondary array 16 further includes: an elliptical diaphragm 10, an elliptical membrane secondary array top electrode 11, an elliptical membrane secondary array top electrode leading out a PAD 12, and the elliptical membrane secondary array 16 is arranged by 16 elliptical diaphragms 10. 4*4 array, the long and short axes of 16 elliptical diaphragms 10 point in the same direction. In addition, the elliptical diaphragms 10 are arranged at equal intervals in the long axis direction with a pitch of 75um, and are arranged at equal intervals in the short axis direction with a pitch of 60um. The top electrodes 11 of the elliptical film sub-array are distributed above the elli...
Embodiment 2
[0054] The present invention needs to control the circuit system related to sending and receiving ultrasonic waveforms, and an elliptical diaphragm capacitive micro-ultrasonic sensor unit needs to apply a bias DC voltage to send and receive ultrasonic waves. When the unit is in the transmitting state, an additional AC pulse excitation is applied between the top electrode 11 of the elliptical membrane secondary array and the silicon substrate 15. Under the simultaneous action of the DC bias voltage and the pulse excitation, the elliptical diaphragm 10 vibrates and sends out pulses. Signal. When the unit is in the receiving state, the elliptical diaphragm 10 generates an AC current signal under the action of the ultrasonic wave, which is received by the circuit detection system to judge the amplitude and phase information of the ultrasonic wave for information processing.
[0055] The circuit system of the ring array of capacitive micro-ultrasonic sensors with elliptical membran...
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