Friction type two-way rectilinear motion micromotor driven by single pair of actuators and preparation method of micromotor

A technology of linear motion and actuator, applied in the direction of piezoelectric effect/electrostrictive or magnetostrictive motor, generator/motor, electrical components, etc., can solve problems such as complex structure, achieve high output efficiency, easy Controlled, process-compatible effects

Inactive Publication Date: 2015-05-13
SHANGHAI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The purpose of the present invention is to overcome the shortcomings of the traditional two-pair actuator-driven friction type bidirectional linear motion micro-motor with complex structure, and provide a single-pair actuator-driven friction type bi-directional linear motion micro-motor and its preparation method, which has a simple structure, The motion direction and speed of the linear motor are adjustable, and the output efficiency is high

Method used

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  • Friction type two-way rectilinear motion micromotor driven by single pair of actuators and preparation method of micromotor
  • Friction type two-way rectilinear motion micromotor driven by single pair of actuators and preparation method of micromotor
  • Friction type two-way rectilinear motion micromotor driven by single pair of actuators and preparation method of micromotor

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Embodiment 1

[0024] see figure 1 , a friction type two-way linear motion micromotor driven by a single pair of actuators, comprising an actuating unit and a slide bar 5, characterized in that: the actuating unit consists of cold and hot arm electrothermal actuators 8a, 8b, a drive rod 4a, 4b and driving heads 3a, 3b; one end of the hot and cold arm electrothermal actuator 8a, 8b is fixed on the silicon substrate through the anchor point 7a, 7b, 7c, 7d, and the other end is connected with the driving rod 4a, 4b, The ends of the drive rods 4a, 4b are square drive heads 3a, 3b, there is a gap between the drive heads 3a, 3b and the slide bar 5, the slide bar 5 is a floating bar, constrained by two longitudinal restraint covers 1a, 1b, The longitudinal restraint covers 1a, 1b are fixed on the silicon substrate through the anchor points 2a, 2b, 6a, 6b, and the anchor points 7a, 7b, 7c, 7d of the electrothermal actuators 8a, 8b of the cold and hot arms are also micromotors. power supply electrod...

Embodiment 2

[0026] see figure 2 with image 3 , this embodiment is basically the same as Embodiment 1, and the special features are as follows: the electrothermal actuators of the cold and hot arms in the actuating unit are replaced by V-shaped electrothermal actuators and electrostatic comb actuators.

Embodiment 3

[0028] see Figure 4 , this embodiment is basically the same as Embodiment 1, and the special features are as follows: the actuating unit is only arranged on one side of the slide bar 5 .

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Abstract

The invention relates to a friction type two-way rectilinear motion micromotor driven by single pair of actuators and a preparation method of the micromotor. The micromotor comprises two parts, namely an actuating unit and a slide bar. The actuating unit comprises actuators, a drive rod and a driving head; the actuator can be an electrothermal actuator, or any actuator capable of generating reciprocating motion, such as an electrostatic actuator, an electromagnetic actuator and a piezoelectric actuator. The slide bar is the output component of the micromotor, and is supported on a substrate by use of an anti-sticking lug and restrined by use of a restraining cover in a direction perpendicular to the substrate. The micromotor is driven by a single pair of actuators to realize the two-way motion of going forwards and backwards; the micromotor is manufactured by use of an MEME surface silicon process without being assembled, and is simple structure and applicable to the fields of communication, aerospace, biomedicine and the like.

Description

technical field [0001] The invention relates to micro-actuators in the technical field of micro-electro-mechanical systems, in particular to a friction-type bidirectional linear motion micro-motor driven by a single pair of actuators and a preparation method thereof. Background technique [0002] With the improvement of miniaturization, miniaturization and precision of products, micromirrors, microgrippers, microaircraft and micro medical devices have put forward higher requirements for the driving mechanism. Large displacement, large driving force, stable and efficient The demand for micro motors is increasing. The requirements for micro-motors in various applications are different. For example, micro-motors used in optical and precision mechanical systems for precise driving and positioning of components require high speed, fast response, and miniaturization; micro-motors used in the aerospace field , requires large output torque, high efficiency, light weight, small size...

Claims

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Application Information

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IPC IPC(8): H02N2/02H02N2/04
Inventor 沈雪瑾王振禄陈晓阳
Owner SHANGHAI UNIV
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