Silicon wafer vacuum adsorption manipulator

Abstract

The invention relates to the technical field of crystalline silicon solar cell automatic production equipment, in particular to a silicon wafer vacuum adsorption manipulator. A manipulator capable of conveying silicon wafers stably and efficiently is provided for online automatic production. The side faces of comb-shaped grooves of comb-shaped vacuum adsorption fingers are concave-convex adsorption surfaces, so that the adsorption area is increased, and the effect of preventing the silicon wafers from being broken is achieved. Through adoption of the manipulator, a plurality of silicon wafers can be stably adsorbed in vacuum, and can be accurately rotated horizontally by preset angles. Furthermore, 50 silicon wafers can be adsorbed at a time and can be rotated by 180 degrees, and 100 silicon wafers are automatically placed together back to back.

Description

technical field [0001] The invention relates to the technical field of automatic production equipment for crystalline silicon solar cells, in particular to a silicon wafer vacuum adsorption manipulator. Background technique [0002] The rapid development of solar photovoltaics has put forward higher and higher requirements for automatic wafer rewinding equipment, especially in the core process equipment diffusion furnace. How to solve the automatic loading and unloading of silicon wafers on quartz boats has become an increasingly urgent requirement for production enterprises. At present, the loading and unloading of quartz boats in the photovoltaic cell production line is mainly completed by manual insertion of a single piece with a vacuum pen. There are 250 slots on the quartz boat, the slot distance is 4.76mm, and the thickness of the silicon wafer is 180μm. It is necessary to insert the silicon wafer back to back. In the quartz boat slot, loading and unloading 500 pieces ...

AI Technical Summary

Problems solved by technology

[0002] The rapid development of solar photovoltaics has put forward higher and higher requirements for automatic wafer rewinding equipment, especially in the core process equipment diffusion furnace. How to solve the automatic loading and unloading of silicon wafers on quartz boats has become an increasingly urgent requirement for production enterprises. At present, the loading and unloading of quartz boats in the photovoltaic cell production line is mainly completed by manual insertion of a single piece with a vacuum pen. There are 250 slots on the quartz boat, the slot distance is 4.76mm, and the thickness of the silicon wafer is 180μm. It is necessary to insert the silicon wafer back to back. In the quartz boat slot, loading and unloading 500 pieces at a time requires high proficiency of workers. The whole process is monotonous and repetitive, and the flow of personnel is very high, which brings great difficulty to production management, and the loading time is long and the damage rate is high. , High production cost, which is not conducive to the large-scale promotion of the entire cell production

Large-scale enterprises use offline rewinders, but they cannot achieve seamless connection with online automatic production lines in assembly operations, and thus cannot achieve efficient online automatic production

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