Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Method for producing a pressure sensor and corresponding sensor

By depositing conductive materials and diffusion barrier layers in the pressure sensor after assembling the support substrate and the deformable membrane, and integrating the housing with thermal lamination technology, the temperature limitations of the oil packaging and the influence of intermediate components in the existing technology are solved, and the sensor is improved. accuracy and stability.

Active Publication Date: 2015-04-08
AUXITROL +1
View PDF5 Cites 1 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0013] Use wires, which can make the structure brittle

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Method for producing a pressure sensor and corresponding sensor
  • Method for producing a pressure sensor and corresponding sensor
  • Method for producing a pressure sensor and corresponding sensor

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0049] A pressure sensor comprises, inter alia, a support 10 and a deformable membrane 20 , a strain gauge 30 and an assembly support 40 arranged between the support 10 and the membrane 20 .

[0050] Measurement of pressure can be absolute or differential.

[0051] The micromechanical structure formed by the deformable membrane and the strain gauges is thus protected by the support 10 .

[0052] The micromechanical structure is electrically connected to the housing 80 through the support part 10 comprising electrical contacts 61 , and the housing 80 further comprises electrical contacts 81 provided inside.

[0053] Advantageously, the deformable membrane 20 comprises an upper surface 201 and a lower surface 202, a pressure-sensitive membrane and / or a thin portion 20b suspended above the free space, and a thick portion 20a forming a support for the thin portion 20b.

[0054] Such a membrane 20 is generally formed from a substrate, for example comprising single crystal silicon ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention relates to a method for producing a pressure sensor, comprising the following steps: assembling a support substrate with a deformable membrane on which strain gauges have been deposited, wherein the deformable membrane comprises a thinned area at the centre thereof, the support substrate is disposed on top of the deformable membrane, the support substrate comprises an upper surface and a lower surface in contact with the deformable membrane, and the support substrate also comprises lateral recesses arranged on top of the strain gauges and a central recess arranged on top of the thinned area of the membrane, so as to obtain a micromechanical structure; and, once the assembly has been obtained, depositing, in a single step, at least one conductive material on the upper surface of the support and in the lateral recesses of the support, said conductive material extending into the recesses in order to be in contact with the strain gauges so as to form electrical contacts in contact with the strain gauges.

Description

technical field [0001] The present invention relates to the manufacture of a micromechanical structure for measuring or detecting mechanical or physical quantities, and in particular to a pressure sensor comprising such a microstructure. Background technique [0002] As is known, a pressure sensor comprises a micromechanical structure "Micro-Electro-Mechanical System" (MEMS) comprising a deformable membrane mounted on a support partially enclosed by a cavity (e.g. a vacuum) with a prevailing reference pressure. separated. [0003] Strain gauges supported by the membrane are capable of measuring the force applied to the membrane by an external energy supply (such as the pressure P ) The strain caused by the deformation caused by the influence. [0004] Pressure sensors of this type are expected to be used in harsh environments and must be protected from external influences. [0005] For this purpose, the micromechanical structure is placed in a protective housing: encapsul...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): G01L9/00G01L9/04G01L9/06G01L19/00B81C1/00
CPCG01L19/0069B81C1/00182B32B38/08G01L7/08G01L9/06B81B7/02B81B2207/07G01L9/04G01L9/0052B81B3/0021G01L9/006G01L9/0045G01L19/0076B81C1/00341G01L9/0048Y10T156/10Y10T29/49888G01L19/147G01L9/0054G01L9/0055B81B2207/096H01L2224/45169B81B7/0006B81B2207/095G01L19/148G01L9/008B81B2201/0264G01L19/0061B81B2203/0127
Inventor S·布里达J-F·勒尼尔
Owner AUXITROL
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com