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Method for manufacturing liquid inkjet head, liquid inkjet head, and printing apparatus

A technology of a liquid inkjet head and a manufacturing method, which is applied to the manufacture of liquid inkjet heads, the fields of liquid inkjet heads and printing equipment, can solve problems such as poor injection accuracy, and achieve the effect of improving printing speed

Active Publication Date: 2016-03-23
ZHUHAI SAILNER 3D TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The invention provides a method for manufacturing a liquid inkjet head, a liquid inkjet head and a printing device, which are used to solve the problem of poor ejection accuracy of the existing liquid inkjet head, so as to improve printing speed and printing accuracy

Method used

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  • Method for manufacturing liquid inkjet head, liquid inkjet head, and printing apparatus
  • Method for manufacturing liquid inkjet head, liquid inkjet head, and printing apparatus
  • Method for manufacturing liquid inkjet head, liquid inkjet head, and printing apparatus

Examples

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Embodiment 1

[0045] figure 1 This is a flowchart of a method for manufacturing a liquid inkjet head provided in the first embodiment of the present invention. Such as figure 1 As shown, the manufacturing method of the liquid inkjet head may include:

[0046] Step 10. Form a pressure generating part on the substrate.

[0047] Step 20: forming a pressure chamber and a common chamber on the first surface of the substrate.

[0048] Step 30: Coating the first resin glue on the surface of the pressure chamber and the common chamber away from the substrate to form a spray hole glue layer.

[0049] Step 40: Perform grayscale exposure treatment on the orifice glue layer to form a cone-shaped orifice on the orifice glue layer at a position opposite to the pressure chamber. Along the direction away from the pressure chamber, the cross-sectional area of ​​the orifice slowing shrieking.

[0050] The aforementioned substrate may be a silicon substrate or a glass substrate, and a silicon substrate is used in thi...

Embodiment 2

[0097] This embodiment provides another method for forming a pressure generating part on the basis of the above embodiment, which may specifically include:

[0098] The vibration plate 4 is deposited and formed on the first surface of the substrate 1.

[0099] Specifically, it can be formed by a low pressure chemical vapor deposition method or a plasma enhanced chemical vapor deposition method, and the material of the vibration plate 4 can be SiO 2 , Si 3 N 4 Or SiO 2 -Si 3 N 4 Of stacks. This step can refer to Picture 10 , Picture 10 It is a schematic structural diagram of forming a vibrating plate on the surface of the substrate in the method for manufacturing a liquid inkjet head according to the second embodiment of the present invention.

[0100] A piezoelectric element 3 is formed on the surface of the vibration plate 4 away from the substrate 1.

[0101] Specifically, a sputtering method may be used to form the lower electrode layer, a sol-gel method to form a piezoelectric l...

Embodiment 3

[0104] This embodiment provides yet another method for forming a pressure generating component on the basis of the foregoing embodiment, which specifically includes:

[0105] A thin film resistance layer 19 is deposited and formed on the first surface of the substrate 1.

[0106] Specifically, a thin film resistive layer 19 can be deposited on the substrate 1, and the material of the thin film resistive layer 19 can be one of tantalum aluminum alloy, nickel-cadmium alloy, tungsten silicon nitride, and titanium nitride. Can refer to Figure 13 , Figure 13 This is a schematic diagram of the structure of forming a thin film resistance layer on a substrate in the method for manufacturing a liquid inkjet head provided in the third embodiment of the present invention.

[0107] For the formation method of other components in the liquid inkjet head, reference may be made to the technical solutions provided in the above-mentioned embodiments, which will not be repeated here. The structure o...

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Abstract

The invention provides a method for making a liquid ink gun, the liquid ink gun and printing equipment. The method comprises the steps that a pressure generating component is formed on a base; a pressure chamber and a common chamber are formed on the first surface of the base; the surfaces, away from the base, of the pressure chamber and the common chamber are coated with first resin adhesives, and spray hole adhesive layers are formed; gray exposure treatment is carried out on the spray hole adhesive layers so that conical spray holes can be formed in the positions, corresponding to the pressure chamber, of the spray hole adhesive layers, and the cross section area of the spray holes is gradually reduced in the direction away from the pressure chamber. According to the method for making the liquid ink gun, the liquid ink gun and the printing equipment, the problem that the jet precision of an existing liquid ink gun is poor can be solved so as to improve printing speed and printing precision, the problem that printing quality is lowered due to the fact that the adhesives are adopted can be avoided, and the mechanical strength of the pressure chamber can be improved.

Description

Technical field [0001] The invention relates to printer manufacturing technology, in particular to a method for manufacturing a liquid inkjet head, a liquid inkjet head and a printing device. Background technique [0002] Printer is a kind of commonly used office equipment. With the gradual advancement of printer technology, file processing speed and printing speed are getting more and more attention. In the prior art, the liquid inkjet head structure of a printer usually includes a substrate, an orifice plate adhered to the first surface of the substrate, and a vibration plate and piezoelectric element arranged on the second surface of the substrate opposite to the first surface. . The processing method of the liquid inkjet head is usually: forming a vibrating plate and piezoelectric elements on the second surface of the substrate, forming a plurality of pressure chambers corresponding to the positions of the piezoelectric elements on the first surface by an etching process, an...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B41J2/16
Inventor 李越
Owner ZHUHAI SAILNER 3D TECH CO LTD
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