Split type differential silicon micro resonant accelerometer
An accelerometer and resonant technology, applied in the field of split-type differential silicon micro-resonant accelerometers, can solve the problems of weakening common-mode error suppression and achieve the effects of eliminating common-mode errors, increasing output signals, and improving quality factors
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[0025] The present invention will be further described below in conjunction with the accompanying drawings.
[0026] as attached figure 1 , 2 Shown in and 3, a split-type differential silicon microresonant accelerometer includes a glass substrate, a lead layer, a bonding layer and a silicon structure layer, the glass substrate is set as a bottom layer, and metal is sputtered on the glass substrate The lead layer is provided with a bonding layer on the glass substrate and the lead layer, and the silicon structure layer is placed on the bonding layer, that is, the silicon structure layer is placed on the glass base layer through a bonding process.
[0027] The silicon structure layer consists of a completely symmetrical two-part structure, including an upper mass 1a and a lower mass 1b. The upper mass block 1b and the lower mass block 1b are identical and arranged symmetrically with respect to the horizontal axis (symmetry line) in the middle of the silicon structure layer, an...
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