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Split type differential silicon micro resonant accelerometer

An accelerometer and resonant technology, applied in the field of split-type differential silicon micro-resonant accelerometers, can solve the problems of weakening common-mode error suppression and achieve the effects of eliminating common-mode errors, increasing output signals, and improving quality factors

Inactive Publication Date: 2015-02-25
SOUTHEAST UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Since the two resonators share a mass, there is coupling between the two, and there will be a measurement dead zone within a certain measurement range
The two resonators of the unequal fundamental frequency silicon microresonant accelerometer adopt an asymmetric design, although the measurement blind zone can be eliminated in the full range, but the suppression of the common mode error is weakened

Method used

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  • Split type differential silicon micro resonant accelerometer
  • Split type differential silicon micro resonant accelerometer
  • Split type differential silicon micro resonant accelerometer

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Embodiment Construction

[0025] The present invention will be further described below in conjunction with the accompanying drawings.

[0026] as attached figure 1 , 2 Shown in and 3, a split-type differential silicon microresonant accelerometer includes a glass substrate, a lead layer, a bonding layer and a silicon structure layer, the glass substrate is set as a bottom layer, and metal is sputtered on the glass substrate The lead layer is provided with a bonding layer on the glass substrate and the lead layer, and the silicon structure layer is placed on the bonding layer, that is, the silicon structure layer is placed on the glass base layer through a bonding process.

[0027] The silicon structure layer consists of a completely symmetrical two-part structure, including an upper mass 1a and a lower mass 1b. The upper mass block 1b and the lower mass block 1b are identical and arranged symmetrically with respect to the horizontal axis (symmetry line) in the middle of the silicon structure layer, an...

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Abstract

The invention discloses a split type differential silicon micro resonant accelerometer. The split type differential silicon micro resonant accelerometer comprises a glass substrate, a lead layer, a bonding layer and a silicon structure layer, wherein the silicon structure layer is composed of an upper part structure and a lower part structure which are completely symmetrical, and each part structure comprises a mass block, a resonator, a lever amplification mechanism, a supporting beam, an anchoring area and other parts; the two anchoring areas are shared by the upper part structure and the lower part structure only in the middle, and the other structures are completely separated. Each mass block is connected with the corresponding anchoring area through a folding beam, each resonator is located in the middle of the corresponding mass block, an output beam and a pivot beam of a lever mechanism in each lever amplification mechanism are located on the same side of a lever arm, an input beam is located on the other side of the corresponding lever arm, an input beam of each lever is connected with the corresponding mass block, and an output beam of each lever is connected with the corresponding resonator. The split type differential silicon micro resonator accelerometer can not only effectively restrain common mode errors, but also completely eliminate coupling influences of the upper resonator and the lower resonator.

Description

technical field [0001] The invention relates to a split-type differential silicon micro-resonance accelerometer, which belongs to micro-electromechanical system (MEMS) and micro-inertia measurement technology. Background technique [0002] Silicon micro accelerometer is a typical MEMS (Micro Electromechanical system, micro electromechanical system) inertial sensor, its processing technology is compatible with microelectronics processing technology, can realize mass production, has the advantages of small size, light weight, low cost, low energy consumption , high reliability, easy intelligence and digitization, and can meet harsh environment applications, etc., is one of the hot spots in the development of accelerometers today, with important military value and broad civilian prospects. [0003] Silicon micro-accelerometers include resonant, capacitive, force-balanced, piezoelectric, piezoresistive, thermal convection, and tunneling current. The resonant silicon micro-accel...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/13G01P15/18
Inventor 黄丽斌李晴云李宏生高阳赵立业
Owner SOUTHEAST UNIV
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