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Micro-angle measurement method and device

A measuring method and technology for measuring devices, which are applied to measuring devices, optical devices, instruments, etc., can solve problems such as disappearance, reduction of light fed back to the laser, and inability to accurately judge signals, so as to expand the range of measuring angles and improve the The effect of precision and sensitivity

Inactive Publication Date: 2017-06-16
ANHUI UNIVERSITY
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Problems solved by technology

However, once the rotation angle of the plane mirror to be measured is slightly larger, the light fed back to the laser will be greatly reduced or even disappear, resulting in the failure to observe the self-mixing phenomenon
In addition, even if a certain signal intensity modulation is generated in the small angle measurement range, it is impossible to accurately judge whether the signal comes from the self-mixing signal caused by the angle change, or from the light intensity change caused by the feedback light
At the same time, the change in the length of the external cavity obtained by this measurement method is related to the incident point of the beam, and a small change in the incident point will have a significant impact on the experimental results

Method used

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Embodiment Construction

[0031] The specific embodiments of the present invention will be further described below in conjunction with the accompanying drawings.

[0032] Please refer to figure 1 As shown, the micro-angle measuring device of the present invention includes a laser light source 1, an aperture 2, a beam splitter 3, a photodetector 4, a signal receiving unit 5, an aperture 6, a rotatable rectangular prism 7, and a reflecting surface 8. In the mode, the micro-angle measurement device is a micro-angle measurement system based on self-mixing interference.

[0033] The outgoing beam of the laser light source 1 in the laser cavity passes through the first diaphragm 2 and is divided into two beams by the beam splitter 3, one of which passes through the second diaphragm 6 and the rotatable right-angle prism 7, and is divided into two beams by the beam splitter 3. After being reflected by the reflective surface 8, it is fed back into the laser cavity, thereby forming a self-mixing signal. The ou...

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Abstract

A micro-angle measurement method and device based on self-mixing interference, the micro-angle measurement device includes a laser light source, a self-mixing processing unit that performs self-mixing processing on the output beam of the laser light source, and converts the self-mixing signal output from the self-mixing processing unit The photodetection unit, and the signal receiving unit that receives the current signal. Wherein, the self-mixing processing unit includes a rotatable rectangular prism and a reflection unit, and the micro-angle measurement method and device can measure a larger angle range.

Description

[0001] 【Technical field】 [0002] The invention relates to a micro-angle measurement method and device, in particular to a micro-angle measurement method and device based on self-mixing interference. [0003] 【Background technique】 [0004] Angle measurement technology is an important part of metrology. With the continuous development of production and science, angle measurement technology is more and more widely used in various fields such as machinery, optics, aviation, aerospace, and military affairs. Among them, micro-angle measurement is a very important part of angle measurement technology, which is characterized by a smaller measurement range and higher measurement accuracy. [0005] According to the basic principle of angle measurement, angle measurement methods mainly include mechanical measurement methods, electromagnetic measurement methods and modern optical measurement methods. Among them, the characteristic of mechanical and electromagnetic measurement methods is...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/26
Inventor 吕亮杨波俞本立向荣吴爽王德辉张文华肖鸿晶蔡文定刘宇
Owner ANHUI UNIVERSITY
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