Exhaust system and method of vacuum drying chamber

Abstract

The invention discloses an exhaust system and method of a vacuum drying chamber. The exhaust system of the vacuum drying chamber comprises a plurality of exhaust openings and an exhaust pump, wherein the exhaust openings are formed outside the vacuum drying chamber; the exhaust pump is connected with the exhaust openings through exhaust pipes. The exhaust method of the vacuum drying chamber includes the steps that when a base plate to be dried is placed in the vacuum drying cavity, exhausting is conducted through the exhaust pump; when the vacuum drying chamber is closed, the exhaust pump is stopped from conducting exhausting; when the dried base plate is taken out of the vacuum drying chamber, exhausting is conducted through the exhaust pump. In conclusion, the multiple exhaust openings are formed outside the vacuum drying cavity, so that when the base plate is stored in and taken out of the cavity, the volatile gas of the dissolved matter of high concentration in the cavity can be discharged through the multiple exhaust openings formed outside the vacuum drying cavity, and the harm to the environment generated in the storing and taking process of the base plate is reduced.

Description

technical field [0001] The invention relates to the technical field of display manufacturing, in particular to an exhaust system and method for a vacuum drying chamber. Background technique [0002] figure 1 Shown is a schematic diagram of an existing vacuum drying chamber, refer to figure 1 , The chamber 12 is composed of an upper chamber 13 and a lower chamber 14 . Generally, the interior of the existing vacuum drying chamber is provided with an exhaust port, which can discharge the volatile gas of the high-concentration dissolved matter in the chamber. However, during the process of taking and placing the substrate 9 in the chamber 12 , some volatile gases of dissolved substances with a high concentration still overflow into the air in the vacuum chamber 12 . As such, there is a hazard to the environment surrounding the chamber. Contents of the invention [0003] The purpose of the present invention is to provide a vacuum drying chamber exhaust system, which is used...

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Problems solved by technology

[0003] The purpose of the present invention is to provide a vacuum drying chamber exhaust system, which is used to solve the problem that some volatile gases with high concentration of dissolved substances overflow out of the vacuum chamber during the process of picking and placing substrates in the existing vacuum drying chamber. in the air, which in turn poses a hazard to the environment around the chamber

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