Micro-electromechanical reflector and method for manufacturing micro-electromechanical reflector

Abstract

The invention relates to a micro-electromechanical reflector, including an electrode substrate having first and second surfaces opposite to the first surface, on whose first surface a monocrystalline silicon layer is situated, a plurality of electrode recesses, which are introduced from the second surface into the electrode substrate, at least one torsion spring structure, which is implemented in the monocrystalline silicon layer above one of the electrode recesses, a carrier substrate, which is applied to the second surface of the electrode substrate, and a reflector surface situated on the monocrystalline silicon layer. At least one first electrode, movably mounted in the electrode substrate via the torsion spring structure, and at least one second electrode, mechanically fixedly anchored to the carrier substrate and the monocrystalline silicon layer, are formed by the electrode recesses. The electrode surfaces of the first and second electrodes are situated in parallel to one another and perpendicularly to the electrode substrate surfaces.

Description

technical field [0001] The invention relates to a microelectromechanical reflector and a method for producing a microelectromechanical reflector, in particular in the field of capacitively operated microelectromechanical reflectors. Background technique [0002] Miniaturized mirrors are used in different applications, for example, optics for portable telecommunication equipment. These mirrors—often also called micromirrors here—can be produced from microelectromechanical structures (MEMS, “micro-electromechanical systems”). [0003] Such a micromirror can be based on the capacitive operating principle, which means that two electrode elements arranged relative to one another in a predetermined geometry are acted upon with a voltage. Movement of the electrodes relative to each other can be induced by varying this voltage. In this case, usually one of the electrodes is fastened to the substrate, while the other of the electrodes is freely movable relative to the substrate wit...

AI Technical Summary

Problems solved by technology

This can lead to limitations in the choice of possible electrode geometries, which in turn can lead to limitations in the degrees of freedom of movement of the electrodes or micromirrors

Furthermore, the mechanical suspension along the torsion axis is often fabricated from polysilicon layer structures or oxide layer structures, whereby the heat that occurs at the mirror surface by radiation can be difficult to dissipate into the substrate

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