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Li-containing phosphoric acid compound sintered body and sputtering target, and manufacturing method thereof

A phosphoric acid compound, manufacturing method technology, applied in chemical instruments and methods, lithium compounds, alkali metal compounds, etc., can solve the problems of nodules, target cracks, inability to perform stable discharge, etc., achieve high relative density, suppress defects, etc. Effect

Inactive Publication Date: 2017-05-24
KOBELCO RES INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0011] However, when forming a film by sputtering, abnormal discharge (arcing) and discharge traces caused by arc discharge will occur
Therefore, stable discharge cannot be performed, and there are problems such as cracks or nodules in the target during sputtering.

Method used

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  • Li-containing phosphoric acid compound sintered body and sputtering target, and manufacturing method thereof
  • Li-containing phosphoric acid compound sintered body and sputtering target, and manufacturing method thereof

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Embodiment

[0061] Hereinafter, the present invention will be described in more detail by citing examples, but the present invention is not limited by the following examples, of course, it can also be appropriately modified and implemented within the scope of being able to meet the gist of the foregoing and the following, and these are all included in the present invention. within the technical range.

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Abstract

Provided is a Li-containing phosphoric-acid compound sintered body of both high relative density and very small crystal grain diameter with reduced incidence of defects (voids) such as air holes, the Li-containing phosphoric-acid compound sintered body causing a Li-containing phosphoric-acid compound thin film useful as a solid electrolyte for a secondary cell or the like to be stabilized without any incidence of target cracking or irregular electrical discharge, and offering high-speed film-forming capability. This Li-containing phosphoric-acid compound sintered body contains no defects measuring 50 µm or larger within a 1 mm 2 cross-sectional region in the interior thereof, while having an average crystal grain diameter of no more than 15 µm and a relative density of at least 85%.

Description

technical field [0001] The present invention relates to a Li-containing phosphate compound sintered body and a sputtering target used for forming a Li-containing phosphate compound thin film useful as a solid electrolyte material such as an all-solid-state secondary battery by a sputtering method. Specifically, the present invention relates to a Li-containing phosphate compound sintered body and a sputtering target capable of stably forming the above-mentioned thin film at a high film-forming rate by a sputtering method, and a method for producing the Li-containing phosphate compound sintered body. Background technique [0002] All-solid thin-film lithium secondary batteries (hereinafter referred to as "Li-based thin-film secondary batteries") are used in various devices such as thin-film solar cells, thin-film thermoelectric elements, and wireless charging elements. The demand for Li-based thin-film secondary batteries is rapidly increasing. A Li-based thin film secondary ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C04B35/447C04B35/645C23C14/34H01M10/0562
CPCC04B35/447C04B35/62605C04B35/645C04B2235/3203C04B2235/5436C04B2235/658C04B2235/72C04B2235/76C04B2235/77C04B2235/786C04B2235/80C04B2235/81C23C14/3414H01J37/3429H01M10/052H01M10/0562Y02E60/10C01D15/00H01J2237/332
Inventor 武富雄一田尾幸树金丸守贺
Owner KOBELCO RES INST
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