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Material for holding item to be polished, and laminate plate using same

A technology for objects to be ground and holders, applied in the direction of grinding workpiece supports, fabrics, electrical components, etc., can solve different problems, achieve the effect of inhibiting scratches, contributing to economic efficiency, and improving plate thickness accuracy

Inactive Publication Date: 2014-12-24
SUMITOMO BAKELITE CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, there is a problem of deformation caused by the difference in the coefficient of linear expansion between the organic fiber base material used for the surface layer and the glass fiber material used for the middle layer, etc. There is room for improvement in terms of the suppression of warping of the retainer and the improvement of plate thickness accuracy

Method used

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  • Material for holding item to be polished, and laminate plate using same
  • Material for holding item to be polished, and laminate plate using same
  • Material for holding item to be polished, and laminate plate using same

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0064] Preparation of resin composition varnish for the first and second fiber substrates

[0065] To a mixture consisting of 50 parts by mass of cresol novolak type epoxy resin 1, 20 parts by mass of bisphenol A type epoxy resin 1, 30 parts by mass of phenol novolak resin 1, and 0.1 parts by mass of 2P4MZ, add As the solvent, methyl ethyl ketone was prepared into a varnish of the resin composition A in which the mass% of the solid content was 55.

[0066] Preparation of the first prepreg

[0067] The glass fiber fabric 1 was impregnated with the varnish of the resin composition A and dried to prepare a prepreg 1A40 (GC1 / resin composition A / resin composition with a resin composition content of 40% by mass and a glass fiber fabric content of 60% by mass 40% by mass).

[0068] Preparation of the second prepreg

[0069] The glass fiber fabric 2 was impregnated with the varnish of the resin composition A and dried to prepare a prepreg 2A41 (GC2 / resin composition A / resin composition with a...

Embodiment 2～14、 comparative example 1、4

[0075] They were blended with the composition shown in Table 1, and the varnishes of the resin compositions A to G were adjusted as the varnishes of the resin compositions for the first and second fiber base materials. After that, GC1 to GC3 as the first fiber base material were impregnated with the varnish of the resin composition in the combination shown in Table 1 so that the GC amount shown in Table 1 was impregnated, and then dried as the outermost layer. 1B40 (GC1 / resin composition B / resin composition content means 40% by mass, the following only differs in resin composition types), 1C40, 1D40, 1E40, 1F40, 1G40, 1A50 (GC1 / Resin composition A / resin composition amount means 50% by mass, and only the type of resin composition is different below), 1B50, 1C50, 2A41 (GC2 / resin composition A / resin composition amount means 41% by mass), 3A74 (GC3 / resin composition A / resin composition amount means 74% by mass, and only the type of resin composition is different below), 3B74, 3C74...

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Abstract

The present invention provides a material for holding an item to be polished that improves warpage and thickness precision of the material, inhibits scratching of the object to be polished, improves wear resistance, and is economically advantageous. This material for holding an item to be polished has, on an outermost layer, a first resin layer formed by impregnating a first fiber substrate with a first resin composition and applying heat and pressure, wherein the first fiber substrate is a glass fiber substrate, and a structure derived from a resin that has a novolac framework accounts for at least 50% by mass of the first resin layer, not including the first fiber substrate.

Description

Technical field [0001] The present invention relates to a polishing object holder and a laminated plate used for the polishing object holder. [0002] This application claims priority based on Japanese Patent Application No. 2012-078719 filed in Japan on March 30, 2012, and Japanese Patent Application No. 2012-269289 filed in Japan on December 10, 2012, and uses the content here. Background technique [0003] When polishing objects to be polished such as silicon wafers, hard disks, etc., a laminate plate used for the holder of the object to be polished uses a prepreg obtained by impregnating a fiber base material with a thermosetting resin such as epoxy resin and drying it (prepreg) A laminated plate formed by stacking a predetermined number and integrally heating and pressing. [0004] The laminated plate is processed to the object holder to be polished as follows. A circular plate of a predetermined size is cut from a laminated plate of a predetermined size, and one or more circu...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B24B37/28H01L21/304
CPCB24B37/28H01L21/304B24B41/06Y10T442/2992B24B37/27
Inventor 武谷光男丸山丰太郎
Owner SUMITOMO BAKELITE CO LTD
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