Gas microflow detection device based on flow sensing mechanism of poison hairs of scorpions

Abstract

The invention discloses a gas microflow detection device based on a flow sensing mechanism of poison hairs of scorpions. The gas microflow detection device consists of a similar poison hair rod, a similar poison hair base part, a similar poison hair seat, an elastic connection film, a first electrode wire and a second electrode wire, wherein the similar poison hair rod and the similar poison hair base part are assembled to form a whole so as to form a similar poison hair structure; the lower half part of the similar poison hair base part is provided with a conductive coating layer; the similar poison hair base part is mounted in a similar spherical cavity assembled by the similar poison hair seat and the elastic connection film; the first electrode wire is embedded into the surface of the elastic connection film; when swinging, the similar poison hair structure is conducted with the conductive coating layer of the similar poison hair base part; a hemispherical groove of the similar poison hair seat just can support the free swinging of the similar poison hair base part therein; the similar poison hair base part is assembled into the similar poison hair seat so as to form an equivalent angular displacement type area-variable capacitive sensor; the second electrode wire is led out of the bottom of the similar poison hair seat and is connected with the conductive layer of the similar poison hair seat. The gas microflow detection device simulates a flow sensing structure of the poison hairs of the scorpions, and the equivalent angular displacement type area-variable capacitive sensor is formed, so that the sensitivity is high.

Description

technical field [0001] The invention belongs to the technical field of gas flow measurement, and in particular relates to a gas micro-flow detection device. The flow velocity or flow rate of the gas to be measured is determined by detecting the swing angle of the vellus-like hair relative to the vellus-like seat. Background technique [0002] It is of great significance to accurately measure gas micro-flow. For example, in order to keep the pressure in the spacecraft cabin normal, it is necessary to carry out leak detection on the cabin and accurately detect the small leak rate flow, which is especially important for long-term manned spacecraft; in the electronics industry and fine chemical industry, precise control of gas is required Micro-flow injection to ensure process quality and product performance stability. [0003] At present, the main gas flow detection includes: mechanical gas flow detection (including membrane gas flow detection and turbine gas flow detection),...

AI Technical Summary

Problems solved by technology

However, the mechanical detection accuracy is low, the device is easy to age and is greatly affected by temperature; the HWA detection must electrically heat the sensor chip, so the power consumption is large and it is not suitable for the detection of flammable and explosive gases; ultrasonic and laser Doppler Velocity and flow detection equipment is complex and expensive, and is generally used in precision measurement laboratories or to calibrate other flow meters, and laser Doppler is not suitable for measuring micro-flow velocity in purification rooms

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