Infrared imaging detector carbon nanotube based on quantum dots and preparation method for the same
A technology of carbon nanotubes and infrared imaging, which is applied in semiconductor devices, final product manufacturing, sustainable manufacturing/processing, etc., can solve problems such as the difficulty of obtaining parallel arrays of carbon nanotubes and the failure to realize high-performance detection devices, and achieve the goal of reducing dark The effect of current level, improved detection rate, and simplified process
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[0052] The present invention will be further described below through specific embodiments and accompanying drawings.
[0053] The infrared imaging detector of the present invention can use several one-dimensional semiconducting carbon nanotubes or several semiconducting carbon nanotube thin film strips, which are similar in the device preparation process. Combining the near-infrared PbS quantum dot material to form a quantum dot-carbon nanotube composite material infrared imaging detector. image 3 It is the basic form of infrared imaging detector using quantum dot-semiconducting carbon nanotube thin film strips. The width of the two asymmetric electrodes on the semiconducting carbon nanotube thin film strip is 1 micron, and the distance between the two asymmetric electrodes is 10 microns. The specific process steps are as follows:
[0054] 1) Obtain the Si / SiO 2 Intrinsically high-density semiconducting carbon nanotube thin film strips a on substrates in Si / SiO using evapora...
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