System and method for phase micro-interference imaging based on common-optical path system
A technology of phase microscopy and interference imaging, which is applied in the direction of material analysis, measuring devices, and instruments through optical means. It can solve the problems of increased noise and increased optical devices, and achieves reduced phase noise, stable optical path, and good use value. Effect
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[0027] The technical solution of the present invention will be described in further detail below in conjunction with the accompanying drawings and specific embodiments.
[0028] The present invention is based on the phase micro-interference imaging technology and method under the common optical path system. The corresponding optical path is as follows: figure 1 shown.
[0029] The laser 1 emits a beam in the horizontal direction, and after passing through the beam expander and collimation system composed of the first lens 2, the vacuum filter 3 and the second lens 4, the transmitted beam above the central axis continues to transmit horizontally forward through the sample 5 and the stage 6, and then pass through the first cylindrical lens 7 as sample light; the light beam below the central axis is transmitted horizontally forward, converged by the first cylindrical lens 7, and then changed to the central axis by the rotatable mirror 8 The light transmitted below, this beam do...
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