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Adapter for vacuum pumps and associated pumping device

The technology of a pumping device and an adapter is applied to the components of the pumping device for elastic fluid, the pump device, the pump, etc., which can solve the problems of difficulty in adjusting multiple control valves at the same time, increasing the unevenness of the pumping speed, etc. Achieve the effect of reducing dead zone, improving pumping uniformity and reducing pressure loss

Active Publication Date: 2014-09-03
PFEIFFER VACUUM GMBH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, it should be understood that where there are multiple vacuum pumps coupled to the chamber, if the control of each individual valve involves different changes in the pressure within the chamber, especially if the positioning of the vacuum pumps causes these changes, It will be difficult to regulate multiple control valves simultaneously
This additional difficulty also increases the non-uniformity of the pumping velocity within the chamber

Method used

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  • Adapter for vacuum pumps and associated pumping device
  • Adapter for vacuum pumps and associated pumping device
  • Adapter for vacuum pumps and associated pumping device

Examples

Experimental program
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Effect test

Embodiment Construction

[0049] Figure 1-4 A first embodiment of the pumping device 1 is shown.

[0050] The pumping device 1 comprises an adapter for a vacuum pump 2 and at least two turbomolecular vacuum pumps 3 , the number of turbomolecular vacuum pumps 3 being three in the example shown.

[0051] The turbomolecular vacuum pumps 3 are identical and each comprise, in a manner known per se, a stationary part in which the rotor 5 moves at a relatively high speed along the axis of rotation I (see image 3 sectional view) for axial rotation.

[0052] In the illustrated example, the turbomolecular vacuum pump 3 comprises a turbomolecular stage 13 and a molecular stage 14 , respectively.

[0053] At the turbomolecular stage 13 the stationary part comprises a housing 4 comprising at a first end an inlet hole 6 coaxial with the axis of rotation through which the pumped gas 7 passes.

[0054] According to an exemplary embodiment, the rotor 5 comprises an upstream part (in the direction of the gas flow) ...

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PUM

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Abstract

The invention relates to an adapter for vacuum pumps, characterized in that it comprises an annular inlet flange (15) intended to be coupled to an outlet orifice of a chamber and an outlet coupling (16) comprising at least two cylindrical outlet through-housings (21) and forming an at least partial pump casing for the case (4) of a respective turbomolecular vacuum pump (3), said turbomolecular vacuum pumps (3) being intended to be received in a respective cylindrical outlet housing (21). The invention also relates to a pumping device, characterized in that it comprises an adapter for vacuum pumps (2) as described hereinabove and at least two turbomolecular vacuum pumps (3) housed at least partially in a respective cylindrical outlet housing (21).

Description

technical field [0001] The invention relates to a turbomolecular vacuum pump coupled to a chamber for generating a high vacuum. Background technique [0002] Creating a high vacuum within the chamber requires the use of pumps that can quickly create and maintain this high vacuum. A turbomolecular type vacuum pump comprising a pump housing housing a housing and in which a rotor is driven into rotation rapidly, for example at speeds in excess of 3000 revolutions per minute, is commonly used. [0003] The pump casing includes an inlet hole coaxial with the rotor, which is coupled with the outlet hole of the chamber. Typically, the pump is fixed to a single fixing structure of the chamber, and support for the pump is provided by a single area surrounding the inlet aperture of the pump and the corresponding outlet aperture of the fixing structure. Thus, the pump housing comprises a coaxial annular coupling flange around the inlet hole, which is clamped and screwed onto the fixe...

Claims

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Application Information

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IPC IPC(8): F04D19/04F04D25/16F04D29/60
CPCF04D29/60F04D25/16F04D19/046F04D19/042F04D29/601
Inventor T·布里昂R·马西斯N·瓦雷纳
Owner PFEIFFER VACUUM GMBH
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