Beam angle modulation device based on digital micromirror device and method thereof

Abstract

The invention discloses a beam angle modulation device based on a digital micromirror device and a method thereof. The device provided by the invention comprises a light source, a DMD and a DMD controller. Light beams emitted from the light source reach to the DMD, and micromirror array deflection of the DMD is controlled by the DMD controller. Thus, beam angle of the light source is modulated, and light beams reflected by the DMD are projected onto a surface of a measured object to present a required angle so as to realize beam angle adjustment. By the utilization of parameters of the DMD deflection micromirror device, characteristics of the angle of light beams irradiated on the surface of the measured object can be determined; and by the utilization of the DMD controller, micromirror array deflection of the DMD is controlled to realize angle correction of light beams irradiated on the surface of the measured object. By applying the device to optical system measurement, there is no need to change hardware of a measuring system, and control of a light source can be realized only by software programming. Beam angle of a light source can be accurately controlled according to needs, so as to meet the requirement of angular adjustment.

Description

technical field [0001] The invention relates to a beam angle modulation device and method based on a digital micromirror device, which is applied to the field of surface topography measurement where the beam angle needs to be adjusted. Background technique [0002] Usually, the measured object cannot move in the online measurement system, so when there is a certain angle between the measured object and the beam irradiated on the surface of the measured object, it will bring a large error to the measurement, especially when the line beam is used. The impact is particularly serious when measuring, or when it is necessary to measure the lateral dimensions such as the shape and outline of the measured object. At present, the method of adjusting the angle of the beam irradiated on the surface of the measured object is mainly to add driving elements such as screws and hinges, and adjust the deflection of the reflective component through the driving of the screw and hinges, so as t...

AI Technical Summary

Problems solved by technology

For the above-mentioned angle correction technology, there are the following main problems: ①Adding driving elements makes the whole system complicated; ②The adjustment angle of the driving elements is not easy to control; ③The driving elements adjust the deflection of the reflective component to adjust the beam angle, and the error is large.

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