Device for measuring four-freedom-degree kinematic errors of guide rail through non-diffraction light

Abstract

The invention discloses a device for measuring four-freedom-degree kinematic errors of a guide rail through non-diffraction light. The device comprises a laser device, a beam expansion collimating mirror, an axicon, a beam splitter prism, a reflecting mirror, a beam splitter, a rectangular prism and video cameras. A kinematic unit composed of the beam splitter and the rectangular prism is fixed to a working platform. Non-diffraction light beams reflected by the beam splitter are received by the first video camera, the non-diffraction light beams transmitted by the beam splitter and reference non-diffraction light beams are received by the second video camera, and by analyzing the change of the positions of center light of non-diffraction light in the two video cameras is analyzed, then the kinematic errors of the perpendicular straightness, the deflection angle, the pitch angle and the roll angle of the guide rail are recognized and measured. The device is simple in structure, large in measurement range, high in accuracy and stability, and good in overall performance, has the multi-freedom-degree measurement function and is a device for measuring multi-freedom-degree errors.

Description

[0001] technical field [0002] The invention belongs to the technical field of motion precision measurement of linear guide rails, and relates to a device for measuring motion errors of multiple degrees of freedom of a guide rail, in particular to a device for measuring the motion errors of four degrees of freedom of a guide rail by using non-diffraction light. [0003] Background technique [0004] With the development of science and technology, large-travel ultra-precision worktables occupy an extremely important position in the field of modern cutting-edge industrial production and scientific research. The motion accuracy of linear guide rails directly affects the processing and measurement accuracy of parts. [0005] When the worktable moves along the linear guide rail, there are positioning errors along the direction of the guide rail, two-dimensional straightness errors perpendicular to the direction of the guide rail (horizontal straightness error, vertical straightn...

AI Technical Summary

Problems solved by technology

The performance of the laser beam used for measurement is affected by many factors, such as laser beam drift and mode changes caused by thermal deformation of the laser, air disturbance will change the beam propagation direction, etc., which will affect the measurement stability and accuracy

Therefore, existing measurement aspects often require expensive, complex lasers

Images