Outer control ultraviolet laser power stabilizing system
An ultraviolet laser and power stable technology, applied in the laser field, can solve the problems of insufficiently rigorous processing of optical path details, cumbersome electrical signal processing, and inaccurate measurement, so as to enhance readability, high-precision and stable optical power, and improve stable accuracy Effect
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[0037] The present invention will be described in further detail below in conjunction with the accompanying drawings.
[0038] refer to figure 1 , the ultraviolet laser power stabilization system of the present invention comprises ultraviolet laser light source 1, ultraviolet environment control room 2, polarizer 21, electro-optical modulator 22, 1 / 4 wave plate 23, analyzer 24, spatial filter 25, sampling device 26, optical chopper 3, optical filter 4, photoelectric preamplifier module 5, feedback control module 6, electro-optical modulation driver 7 and laser light power detector 8. in:
[0039] The ultraviolet laser light source 1 includes an all-solid-state laser 11 , an all-solid-state laser mirror 12 , a calibration laser 13 , a calibration laser mirror 14 and an aperture 15 .
[0040] The power of the all-solid-state laser 11 used in this example is 30 milliwatts, which emits ultraviolet laser light with a wavelength of 266 nm, and the optical power fluctuation range o...
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