Cutting tools made of cubic boron nitride based sintered materials
A cubic boron nitride, boron nitride-based technology, applied in the field of cBN tools, can solve the problems of easy defects, short tool life, insufficient adhesion strength of cBN particles and bonding phase, etc.
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[0140] Fabrication of cBN particles coated with AlN(O) film:
[0141] (a) Using cBN particles with an average particle size of 0.5 to 8 μm as the base material, the surface of the particles is coated with Al in a uniform and thin film according to the ALD (Atomic Layer Deposition) method 2 o 3 film, followed by the Al 2 o 3 A uniform thin-film AlN film is formed on the film.
[0142] More specifically, for example, cBN particles having a predetermined particle size are charged in the furnace, and the temperature in the furnace is raised to 300°C. Next, Al(CH 3 ) 3 and H 2 O gas, and using Ar gas as the purge gas, perform (i) Ar+Al(CH 3 ) 3 Gas inflow process, (ii) Ar gas purge process, (iii) Ar+H 2 O gas inflow process, (iv) Ar gas purge process. The steps (i) to (iv) are regarded as one cycle, and this cycle is repeated for a desired film thickness. Film formation is performed in 0.25 to 3 hours, whereby the surface of cBN particles is uniformly coated with Al havi...
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