Cutting tool made from cubic boron nitride sintering material
A cubic crystal boron nitride, boron nitride-based technology, applied in the field of cBN tools), can solve the problem of insufficient adhesion strength between cBN particles and the binding phase, insufficient adhesion strength between cBN particles and the binding phase, and easy defects, etc. question
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[0140] Fabrication of cBN particles coated with AlN(O) film:
[0141] (a) Using cBN particles with an average particle size of 0.5 to 8 μm as the base material, the surface of the particles is coated with Al in a uniform and thin film according to the ALD (Atomic Layer Deposition) method 2 o 3 film, followed by the Al 2 o 3 A uniform thin-film AlN film is formed on the film.
[0142] More specifically, for example, cBN particles having a predetermined particle size are charged in the furnace, and the temperature in the furnace is raised to 300°C. Next, Al(CH 3 ) 3 and H 2 O gas, and using Ar gas as the purge gas, perform (i) Ar+Al(CH 3 ) 3 Gas inflow process, (ii) Ar gas purge process, (iii) Ar+H 2 O gas inflow process, (iv) Ar gas purge process. The steps (i) to (iv) are regarded as one cycle, and this cycle is repeated for a desired film thickness. Film formation is performed in 0.25 to 3 hours, whereby the surface of cBN particles is uniformly coated with Al havi...
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