A method for resisting single event burnout of power semiconductor devices
A power semiconductor, anti-single particle technology, applied in the direction of semiconductor devices, semiconductor/solid-state device manufacturing, electrical components, etc., can solve the problems of thermal damage to the device, increase of internal current, etc., to improve the threshold voltage, suppress the SEB effect, improve the The effect of anti-SEB ability
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[0015] The drift region of power semiconductor devices is evenly divided into 2-4 regions according to the lateral thickness. During implementation, it is divided into 3 regions, and the minority carrier lifetime is reduced for one of the regions; the drift region of power semiconductor devices is evenly divided into 2-4 regions according to the vertical thickness. , when implemented, it is divided into 3 regions, and the minority carrier lifetime is reduced for one of the regions. The region that reduces the minority carrier lifetime is selected from the region that has the greatest impact on the conduction of the parasitic tube of the power semiconductor device. Proton, neutron or electron irradiation methods are used to reduce the minority carrier lifetime.
[0016] The method and beneficial effects of the present invention will be further described below in conjunction with specific experiments.
[0017] Such as figure 1 As shown, the experiment selects 70V power UMOSFET...
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