A high-precision supply method and equipment for germanium tetrachloride

Abstract

The invention relates to a high-precision germanium tetrachloride (GeCl4) supplying method and high-precision germanium tetrachloride supplying equipment for manufacturing a core rod of an optical fiber preform rod. The equipment comprises a programmable logic controller (PLC) of evaporating equipment, a touch screen of the evaporating equipment, a PLC of VAD equipment, a heating tape I, a heating tape II, a heating tape III, a heating tape IV, a temperature sensor I, a temperature sensor II, a temperature sensor III, a temperature sensor IV, a pressure sensor, a liquid level sensor, a control valve I, a control valve II, a control valve III, a mass flow rate controller I, a mass flow rate controller II, an evaporating pot and a power supply, wherein the evaporating pot is provided with a liquid level sensor, the pressure sensor, the temperature sensor I and an electronic scale for monitoring the situation of the evaporating pot, the electronic scale is arranged at the bottom of the evaporating pot for monitoring weight in real time, the heating tape I is arranged outside the evaporating pot, a GeCl4 fluid delivery pipe is arranged on the evaporating pot, the control valve I is arranged on the GeCl4 fluid delivery pipe, an evaporating pot outlet pipeline is arranged on the evaporating pot, and the power supply supplies power to the evaporating equipment.

Description

technical field [0001] The invention relates to a high-precision supply method and equipment for germanium tetrachloride (GeCl4), which are used to manufacture core rods of optical fiber prefabricated rods. technical background [0002] There are four main manufacturing processes for the core rod of the preform, namely the well-known PCVD (low temperature plasma vapor deposition method), MVCD (modified chemical vapor deposition method), VAD (axial vapor phase deposition method) and OVD (external vapor phase deposition method). ). This patent is mainly combined with the VAD process to make the core rod. The core technology of VAD is to use GeCl4 doping to make the core rod core layer with high refractive index. The doping uniformity of GeCl4 directly affects the optical performance of the preform and affects the transmission of the optical fiber. performance. [0003] The GeCl4 supply system currently used in the traditional VAD process is a bubbling tank, and the gasificat...

AI Technical Summary

Problems solved by technology

But there is no mention of germanium tetrachloride vaporized supply to make germanium dioxide and the method of precise flow control

Images