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Method for realizing wide nano-particle beams by using neutral cluster beam nozzle assembly

A nanoparticle and beam technology, applied in nanotechnology, nanotechnology, nanotechnology for materials and surface science, etc., can solve problems such as diminishing returns, and achieve the effect of increasing utilization and improving efficiency

Inactive Publication Date: 2014-05-14
NANJING UNIV
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

At present, efforts to further increase the nanoparticle throughput of individual cluster beam guns have had limited success

Method used

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  • Method for realizing wide nano-particle beams by using neutral cluster beam nozzle assembly
  • Method for realizing wide nano-particle beams by using neutral cluster beam nozzle assembly
  • Method for realizing wide nano-particle beams by using neutral cluster beam nozzle assembly

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Embodiment Construction

[0032] Figure 1-4 As shown in , sputtering target 1, nozzle hole 2, separation hole (separator) 3, beam center 4, beam outer edge 5, nozzle hole 6, and beam axis 7.

[0033] Equally scaled down, cluster beam guns with smaller diameters are used, and multiple beam guns are integrated together using a beam cluster plate. Such as image 3 , the beam cluster plate is divided into two layers, the first layer is a plurality of (beam gun) nozzles, the second layer is a separator, and the separator corresponds to the nozzle one by one (to form a beam gun), the separator It is on a straight line with the axis of the nozzle, and the distance between the two layers is between 0.5cm and 5cm.

[0034] Furthermore, this cluster beam gun can be used to form a continuous wide-width nanoparticle beam. The key point is to integrate enough beam guns and scan the substrate to be processed in a given direction. In particular, at this time, the number of cluster beam guns integrated in the beam...

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Abstract

The invention provides a method for realizing wide nano-particle beams by using a neutral cluster beam nozzle assembly. The beam nozzle assembly is realized by using a beam clustering plate, namely an integrated beam gun, wherein the beam clustering plate is divided into two layers, the first layer comprises a plurality of nozzles of the integrated beam gun, the second layer comprises separators which are in one-to-one correspondence with the nozzles, the axes of the separators and the nozzles are on the same axis, and the distance between the two layers is in the range of 0.5cm to 5cm. The structure of the neutral clustering beam nozzle assembly can be used for nanometer fabrication of the nano-particle beams with relatively large areas and relatively high flux and realization of the relatively large-area nanometer spraying. The wide nano-particle beams with high particle flux realized by means of the structure are beneficial to increasing of yield in unit time when cluster beams are used for carrying out surface nanometer fabrication, reduction of energy consumption and improvement of efficiency, so that the unit cost of nanometer fabrication is effectively reduced.

Description

technical field [0001] The invention belongs to the field of nano-manufacturing, and in particular relates to a process of using particle beams for large-scale nano-processing, which can realize nano-processing of desired size and shape, and is used in the field of nano-coating and even nano-textiles. Background technique [0002] Due to the fine control of small size and new physical and chemical properties, nanostructured materials have become a research hotspot in the field of advanced materials, and it is also one of the hotspots in materials engineering in recent years. Nanomanufacturing refers to the controllable processing of nanoscale structures and the controllable preparation of related materials and devices through methods such as mechanics, physics, chemistry, biology, and material science, and is concerned with processing, forming, Modification and cross-scale fabrication and more. Therefore, the nano-manufacturing process is the key to the current development ...

Claims

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Application Information

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IPC IPC(8): C23C14/34B82Y30/00
Inventor 宋凤麒葛建雷韩民王广厚
Owner NANJING UNIV
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