Upper-and-lower computer communication monitoring method

Abstract

The invention relates to the monitoring technology of semiconductor devices, and discloses an upper-and-lower computer communication monitoring method. The upper-and-lower computer communication monitoring method includes the steps that S1, an upper computer sends a setting signal to a lower computer to start monitoring; S2, the lower computer sends a feedback signal to the upper computer after receiving the setting signal, conducts resetting after a first preset delay time, and meanwhile conducts resetting timing; S3, the upper computer sends a setting signal to the lower computer according to the feedback signal, conducts resetting after a second preset delay time, and meanwhile conducts resetting timing; S4 it is judged whether any resetting timing time exceeds a preset threshold value or not, and executing the step S2 if no resetting timing time exceeds the preset threshold value, and the upper computer or the lower computer correspondingly gives out an alarm signal if any resetting timing time exceeds the preset threshold value.

Description

technical field [0001] The invention relates to the technical field of monitoring of semiconductor production equipment, in particular to the communication monitoring technology of upper and lower computers. Background technique [0002] Vertical oxidation furnace equipment is indispensable in the semiconductor production industry, and requires high reliability and stability. The process failure caused by equipment causes tens of millions of losses, and the leakage of some process gases may also threaten the safety of life and property. Therefore, any possible unstable details of the equipment should be paid attention to. Among them, for the process interruption caused by the communication problems between the upper computer and the lower computer, if it is found and handled properly in time, it may save millions of economic losses and Safety of life and property. [0003] At present, some domestic equipment adopts the method of simply setting a certain relay of the lower ...

AI Technical Summary

Problems solved by technology

[0007] The purpose of the present invention is to provide a communication monitoring method for the upper and lower computers, increase the interaction between the upper and lower computers in communication monitoring, and at the same time, both the upper and lower computers respond to communication abnormalities, which can solve the problem of only targeting the upper and lower computers in the existing communication monitoring. One party detects, handles and responds to exceptions only for one party's problems

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