Automatic skip-stop detection system

Abstract

The invention provides an automatic skip-stop detection system capable of detecting multiple lots of products on any detection station. The automatic skip-stop detection system is characterized by comprising a storage module, an acquisition module, a processing module and an execution module; information of various stations is stored by the storage module; the acquisition module is used for scanning each lot of products passing through the station and acquiring corresponding station information of the products through the storage module; the processing module is used for selecting different sampling detection rules according to the station corresponding to the lot of products; the execution module is used for detecting the products. Different sampling detection rules are set to realize sampling detection of different lots of products according to lot difference and importance degree of the corresponding production stations, so that detection precision and detection efficiency are improved.

Description

technical field [0001] The invention relates to the field of semiconductor detection, in particular to an automatic skipping detection system, which can automatically screen the number of products entering the station of important machine products, and better monitor the production line to make it run more efficiently. Background technique [0002] Semiconductor production is a very complicated process. The main job of the yield engineer is to monitor the normal operation of the production line and to quickly and timely discover various abnormalities on the production line. The yield engineer has to scan a large number of products on the production line to find out Various problems on the production line. [0003] The industry now generally adopts different measurement stations. Each defect scanning station corresponds to a machine or a product of the same machine, and each station sets a ratio. One of the machine products enters (arrives) the inspection During the site, th...

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Problems solved by technology

But this also leads to a problem: Since the site can pass and test at most 200 batches of products a day, it cannot meet the testing requirements for all 300 batches of products in one day, and the extra 100 batches of products will be directly lost. After testing or the yield engineer artificially skips the station and enters the next process; if there are seriously defective products in the 100 batches of products, because they have not been tested, the yield engineer cannot find the defective products in time and find out the defects that lead to the products The corresponding equipment, and then the products produced by the problematic equipment will also cause defects, thereby reducing the product yield

[0006] At the same time, due to the unevenness of the products on the production line, many lots (batches) produced by different machines at the same site may enter the YE (Yield Enhancement, yield improvement) scanning site at the same time, and the yield engineer artificially checks the redundant 100 batches of products Bounced goods may prevent the products produced by multiple machines from being detected, and the products of some machines are repeatedly sampled, resulting in the narrowing of the detection range; there are also products entering the YE scanning site with different priorities, and the yield engineer Artificially skipping goods will cause problems such as the situation of important machines on the production line cannot be detected even though many products have been scanned

[0007] At the same time, since a site generally only has one sampling probability, such as figure 1 As shown, there may be three batches of products from different machines entering the station for inspection, but the sampling probability of this station is 20%, that is, the products with the last digit of the batch being 1 and 5 are selected For testing, products 1, 5, 11, and 15 were selected for testing, but the products of batch 2 have a more important process or a higher defect rate. Ideally, it is necessary to increase the sampling probability (such as 50%) for inspection. Locate its defective products more accurately, but once the sampling probability is increased, other batches of products will also be affected, and the site will also sample other batches of products with a 50% probability, resulting in low sampling efficiency; at the same time, the importance of batch 3 products Generally, a sampling probability of 10% is enough, but the existing technology adopts indiscriminate sampling rules for detection, not only the detection accuracy is low, but the detection efficiency is relatively average

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