A solid-liquid interface measuring device for silicon ingot furnace
A technology of silicon ingot furnace and solid-liquid interface, which is applied in the field of solid-liquid interface measuring devices and devices for measuring the depth of molten silicon. The effect of low manufacturing cost and accurate measurement structure
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Embodiment 1
[0046] like Figure 1 to Figure 3 As shown, the solid-liquid interface measuring device for a silicon ingot furnace of the present invention includes: a quartz rod 1, a cylinder 2, a driving device 3, a pressure sensor 4 and a PLC 6, and the quartz rod 1 is vertically arranged for contact with the silicon ingot furnace. The solid polysilicon in the ingot furnace is contacted to detect the height of the solid polysilicon, that is, the depth of the molten silicon material in the silicon ingot furnace, figure 1 The silicon ingot furnace is not shown in the figure, only the upper cover 14 of the silicon ingot furnace is shown, and the quartz rod 1 extends into the silicon ingot furnace from the opening of the upper cover 14 . The first piston rod 24 of the cylinder 2 is always in an extended state, and the first piston rod 24 is connected with the quartz rod 1 . The driving device 3 is used to drive the cylinder 2 to move linearly up and down. Since the quartz rod 1 is fixedly co...
Embodiment 2
[0066] like Figure 4 and Figure 5 As shown, the difference between the second embodiment and the first embodiment is only that the cylinder is different. The cylinder 2 of the present embodiment adopts a secondary protection cylinder, and one side of the piston 23 of the cylinder 2 is connected to the first piston rod 24 connected to the quartz rod 1 , the other side of the piston 23 is connected with a second piston rod 25 , and a position sensor 13 is arranged on the second piston rod 25 or on the cylinder body 22 .
[0067] The setting of this embodiment is to prevent the pressure sensor 4 from sensing a sudden change when the lower end of the quartz rod 1 detects a solid-liquid interface when the pressure sensor 4 is no longer sensitive to pressure after being used too many times or the pressure sensor 4 fails. Force, the driving device 3 does not drive the quartz rod 1 to move upwards. At this time, the quartz rod 1 will move upwards under the reaction force of solid p...
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