An Interlocking Solenoid Valveless Piezoelectric Pump
A valveless piezoelectric pump, interlocking screw technology, applied in the direction of pumps, pump components, variable capacity pump components, etc., can solve problems such as unfavorable integration and miniaturization, increased local resistance, secondary flow loss, etc. The effect of easy flow control, reduced forward flow resistance, and reduced loss
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[0021] refer to figure 1 , figure 2 and Figure 5 , the present invention includes a pump body 8, a pump cover 2 and a piezoelectric vibrator 3, the material of the pump body 8 is a silicon wafer, the material of the pump cover 2 is glass, and the pump inlet 1, pump The outlet 5 and the upper part of the pump chamber 4 are processed on the pump body 8 by using a dry etching process to process the inlet buffer chamber 6, the outlet buffer chamber 10, the inlet flow pipe 7, the outlet flow pipe 9 and the lower half of the pump chamber 4 Part, the inlet flow pipe 7 and the outlet flow pipe 9 have the same structure and are coaxially arranged, and are equidistant from the center of the pump chamber 4; one end of the inlet flow pipe 7 communicates with the inlet buffer chamber 6, the other end communicates with the pump chamber 4, and the outlet flow pipe 9 One end communicates with the pump chamber 4, the other end communicates with the outlet buffer chamber 10, and the inlet b...
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