Flexible multifunctional vacuum coating equipment and its intelligent control system

A vacuum coating, multi-functional technology, applied in vacuum evaporation coating, sputtering coating, ion implantation coating and other directions, can solve the problem of single structure and function, and achieve the effect of ensuring stability

Active Publication Date: 2019-03-08
GUANGDONG STRONG METAL TECH
View PDF8 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] One of the purposes of the present invention is to solve the defect of single structure and function in the vacuum plasma coating equipment of the prior art, introduce a flexible mechanism, improve the ability of the system to adapt to changes in the internal and external environments, and provide a flexible multi-functional vacuum coating equipment

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Flexible multifunctional vacuum coating equipment and its intelligent control system
  • Flexible multifunctional vacuum coating equipment and its intelligent control system
  • Flexible multifunctional vacuum coating equipment and its intelligent control system

Examples

Experimental program
Comparison scheme
Effect test

specific Embodiment 1

[0038] refer to figure 1 , the flexible modular multifunctional plasma coating equipment involved in this embodiment, its vacuum chamber 1 is an equilateral octagonal prism-shaped sealing structure, surrounded by a vacuum chamber door 2 and a plurality of rectangular facades of different forms and uses Formed, and its center forms a sealed cavity; the side wall of the vacuum chamber 1 is composed of several rectangular facades, one of which is provided with a vacuum obtaining equipment connection port 5, and the other facades are respectively provided with a rectangular flange hole 3. The rectangular flange hole 3 is provided with an easy-to-assemble and disassemble rectangular flange plate 6, and the rectangular flange plate 6 is provided with one or more than two target connecting holes 7, forming a flexible connection mechanism; the vacuum chamber door 2 includes a Or two or more facades, each facade is provided with a rectangular flange hole 3, a rectangular flange plate 6...

specific Embodiment 2

[0061] refer to figure 2 , the characteristics of this embodiment 2 are: the sealing structure when the vacuum chamber 1 is cylindrical, the vacuum chamber door 2 and the center of the vacuum chamber 1 form a sealed cavity; the side elevation of the vacuum chamber 1 is provided with a vacuum obtaining equipment connection port 5. One or more rectangular flange holes 3 are provided at the remaining positions, and a rectangular flange plate 6 is provided at the rectangular flange hole 3, and one or more than two target connecting holes 7 are arranged in the rectangular flange plate 6, A flexible connection mechanism is formed; the facade of the vacuum chamber door 2 can also be provided with a rectangular flange hole as required, and a rectangular flange plate 6 is provided at the rectangular flange hole 3, and a rectangular flange plate 6 is provided with one or More than two target base connection holes 7 form a flexible connection mechanism; through the target base connectio...

specific Embodiment 3

[0062] refer to Figure 4 , the characteristics of the present embodiment 3 are: the facade of the vacuum chamber 1 and the vacuum chamber door 2 form an equilateral octagonal prism structure, wherein three sides constitute the vacuum chamber door 2, and one side of the vacuum chamber is provided with a vacuum obtaining equipment connection The other six sides are provided with rectangular flange holes for installing the rectangular flange plate 6. Two rectangular flange plates opposite to each other form a group, each of the first group of rectangular flange plates is provided with a circular target seat connecting hole for installing the anode target 14; each of the second group of rectangular flange plates is provided with two The connecting holes of the circular target base are used for installing the cathode target 8; the third group of rectangular flange plates are respectively provided with three connecting holes of the circular target base for installing the cathode ta...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

The invention relates to flexible and multifunctional vacuum coating equipment and an intelligence control system, comprising a vacuum chamber, which is characterized in that: the vacuum chamber is composed of a vacuum chamber cavity and a vacuum chamber door, and the vacuum chamber is of a multilateral prism- or cylinder-shaped seal structure; one or more connection port are arranged in the vacuum chamber, and one or more rectangular flange holes are arranged on a side vertical face of the vacuum chamber; an easily-assemble and -disassemble type rectangular flange plate is arranged at the rectangular flange holes, and a target stand connection hole is arranged in the rectangular flange plate, to compose a flexible connection mechanism; a baffle plate device is arranged at the target stand connection hole part, target stands with different manners are assembled by the target stand connection hole, and easily-assemble and -disassemble type target stand connection mechanisms with a plurality of different manners and module devices with different functions are formed on the rectangular flange plate; and a plurality of modularization device compose modularization multifunctional coating equipment, to implement equipment flexibility configuration. By different target material combinations and the intelligence control system, the equipment implements multiple composite coating and nanometer coating technology, and has a beneficial effect for raising coating performances.

Description

technical field [0001] The invention relates to a vacuum coating equipment, in particular to a flexible multifunctional vacuum coating equipment and its intelligent control system, which belongs to the field of vacuum plasma coating technology and equipment. technical background [0002] Arc ion plating and magnetron sputtering are two common vacuum plasma coating technologies, and they are complementary to a certain extent. For example, arc ion plating has a faster deposition rate and good bonding force, while magnetron sputtering Plating has a high surface finish. Because of this, the fields of application of the former two are different. In recent years, with the improvement of product requirements, the application of magnetron sputtering plating and arc ion plating on one product has gradually increased. On the other hand, in order to improve the coating performance, some products need to introduce some plasma heat treatment related technologies during the coating proc...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/22C23C14/54C23C14/35C23C14/46
Inventor 董小虹张中弦刘志辉黄拿灿亚历山大·哥罗沃依
Owner GUANGDONG STRONG METAL TECH
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap