Vertical pre-tightening type stick-slip drive cross-scale precise motion platform

Abstract

The invention discloses a vertical pre-tightening type stick-slip drive cross-scale precise motion platform which comprises a base plate, a base, a friction oscillator, an oscillator drive source and a sliding block. A pre-tightening force adjusting structure for providing pre-tightening force is arranged between the sliding block and the base plate and comprises adjusting screws used for providing the pre-tightening force, the adjusting screws penetrate through the sliding block and the base and then are connected with the base plate, and the pre-tightening force can be adjusted by adjusting the threaded connection length of the adjusting screws and the base plate. The pre-tightening force adjusting method of the motion platform is greatly simplified, machining and assembling are facilitated, the output performance of the stick-slip drive cross-scale precise motion platform is effectively improved, motion precision and consistency of the stick-slip drive cross-scale precise motion platform are simply and effectively ensured, and volume production is facilitated.

Description

technical field [0001] The invention belongs to the technical field of precision motion, and in particular relates to a bottom pre-tightened stick-slip driving cross-scale precision motion platform. Background technique [0002] Cross-scale precision motion technology with nanometer-level motion resolution and millimeter-level motion travel is the key technology in the field of micro-drives. Compared with other types of cross-scale motion driving methods, the stick-slip drive is simple, convenient, and easy to control, and has the advantages of large motion range, high resolution, simple structure, easy miniaturization, and precise positioning. A method that is widely used in the current cross-scale drive. The working principle of the stick-slip drive is mainly based on the friction force as the driving source, and uses the stick-slip effect to realize the tiny movement of the driven body. The difference between the forces is used to achieve precise motion across scales. ...

AI Technical Summary

Problems solved by technology

For the upper and lower spring preloaded stick-slip drive cross-scale precision motion platform, the related public technology has the publication number or patent number of WO2009043421A1, US6940210B2, US7579752B2, US20080148589A1 and other patents. Its working principle is mainly to divide the motion platform into upper and lower parts. The tension spring is used to adjust the friction force between the upper and lower parts and the friction vibrator. The tension spring adjusts the pre-tightening force through the thread structure, and the guiding is realized by the diamond-shaped friction surface. The adjustment range of the friction pre-tightening force is relatively small. Difficulty adapting to small differences in frictional interfaces

[0004] Although the above three kinds of stick-slip drive cross-scale precision motion platforms are different in the friction preload structure and adjustment methods, their common point is that the friction force preload structure and adjustment methods are too complicated to set As a result, the friction adjustment of the contact interface between the stick-slip friction vibrator and the motion platform is limited, the friction adjustment range is small, and the processing accuracy of the friction interface is high, which in turn leads to relatively high requirements for the processing and assembly accuracy of the stick-slip drive platform. High, ultimately affecting the motion accuracy and consistency of the cross-scale precision motion platform, so these existing technologies have technical problems such as complex manufacturing process and high manufacturing cost in ensuring the consistency of mass production of the cross-scale precision motion platform

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