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An Array Type Microhole Cathode Gas Discharge Plasma Jet Device

A technology of discharging plasma and cathode gas, which is applied in the directions of plasma and electrical components, can solve the problem of small jet area, and achieve the effect of increasing the area, ensuring the consistency of plasma characteristics and ensuring the consistency of characteristics.

Active Publication Date: 2016-02-10
CHONGQING UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although the area of ​​the plasma jet is larger than that of the single-hole DC micro-hole cathode discharge, in practical applications, the jet area is still relatively small, and there are still limitations.

Method used

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  • An Array Type Microhole Cathode Gas Discharge Plasma Jet Device
  • An Array Type Microhole Cathode Gas Discharge Plasma Jet Device
  • An Array Type Microhole Cathode Gas Discharge Plasma Jet Device

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Embodiment

[0024] Examples: See figure 1 , figure 2 with image 3 , An array type microcavity cathode gas discharge plasma jet device, comprising a high-voltage electrode 10, an insulating dielectric layer 20, and a ground electrode 30 arranged from top to bottom. The high-voltage electrode 10 and the ground electrode 30 are made of conductive materials, The insulating medium layer 20 is made of insulating material; the high-voltage electrode 10 is a hollow box structure, the hollow part of the box structure is a high-voltage electrode gas storage cavity, and the box structure has gas storage for the high-voltage electrode The air inlet 11 in the cavity; the bottom of the box structure has multiple first through holes, the insulating dielectric layer 20 has multiple second through holes, and the ground electrode 30 has multiple third through holes, so The plurality of first through holes, the plurality of second through holes and the plurality of third through holes correspond one-to-on...

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Abstract

The invention discloses an array type microhole cathode gas discharge plasma jet device, which comprises a high-voltage electrode, an insulating medium layer and a ground electrode arranged from top to bottom, and the high-voltage electrode and the ground electrode are both made of conductive materials. The insulating medium layer is made of insulating material; the high-voltage electrode is a hollow box structure, and the hollow part of the box structure is a high-voltage electrode gas storage cavity, and the box structure has an air intake hole to inflate the high-voltage electrode gas storage cavity; The bottom of the box structure, the insulating medium layer and the ground electrode respectively have a plurality of first through holes, second through holes and third through holes, and the first through holes, the second through holes and the third through holes are coaxial set with the same aperture. Compared with the existing 8-hole array air plasma jet device, the present invention increases the number of micro-hollows, increases the area of ​​plasma jets, and is more conducive to industrialization; more importantly, it can realize uniform discharge of arrayed micro-hollows.

Description

technical field [0001] The invention belongs to the technical field of gas discharge, in particular to an array type microhole cathode gas discharge plasma jet device. Background technique [0002] Atmospheric pressure non-equilibrium plasma jet (abbreviated as N-APPJ) has attracted great attention internationally in recent years and has become an important research topic in the field of gas discharge. Compared with the traditional gas discharge plasma, the biggest advantage of N-APPJ is that the plasma is ejected out of the discharge area, and the operator does not need to touch the high-voltage electrode, which greatly improves the safety of use. In addition, N-APPJ gets rid of the expensive vacuum system, and the Joule heating of this type of jet plasma is low, and almost all the electric energy is used to stimulate the particle activity in the plasma. Under certain conditions, the discharge temperature can be close to room temperature. At present, N-APPJ has been widely...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H05H1/24
Inventor 刘坤王琛颖廖华何为
Owner CHONGQING UNIV
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