An Array Type Microhole Cathode Gas Discharge Plasma Jet Device
A technology of discharging plasma and cathode gas, which is applied in the directions of plasma and electrical components, can solve the problem of small jet area, and achieve the effect of increasing the area, ensuring the consistency of plasma characteristics and ensuring the consistency of characteristics.
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[0024] Examples: See figure 1 , figure 2 with image 3 , An array type microcavity cathode gas discharge plasma jet device, comprising a high-voltage electrode 10, an insulating dielectric layer 20, and a ground electrode 30 arranged from top to bottom. The high-voltage electrode 10 and the ground electrode 30 are made of conductive materials, The insulating medium layer 20 is made of insulating material; the high-voltage electrode 10 is a hollow box structure, the hollow part of the box structure is a high-voltage electrode gas storage cavity, and the box structure has gas storage for the high-voltage electrode The air inlet 11 in the cavity; the bottom of the box structure has multiple first through holes, the insulating dielectric layer 20 has multiple second through holes, and the ground electrode 30 has multiple third through holes, so The plurality of first through holes, the plurality of second through holes and the plurality of third through holes correspond one-to-on...
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