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Ammonia absorption device and method for preparing ultra-clean high-purity ammonium hydroxide

An ammonia absorption and ammonia absorber technology, which is applied in the field of high-purity ammonia water absorption devices, can solve the problems of inability to obtain ultra-clean high-purity ammonia water, etc., and achieves the effects of good application value, compact equipment structure and high output.

Active Publication Date: 2013-12-25
ZHEJIANG JIANYE CHEM +2
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, these patents are for the production of industrial-grade ammonia, and the materials used are not ultra-clean and high-purity materials. Using these existing industrial-grade ammonia preparation devices, it is impossible to obtain ultra-clean and high-purity ammonia that meets the SEMI-C12 standard for the electronics industry.

Method used

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  • Ammonia absorption device and method for preparing ultra-clean high-purity ammonium hydroxide

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Effect test

Embodiment 1

[0021] The ammonia absorption device constructed with high-purity materials includes a liquid ammonia tank 1, an ammonia gas deoiling device 2, an ammonia gas degranulation device 3, an ammonia absorber 4, and an ultra-clean and high-purity ammonia water storage tank 5 connected in sequence, wherein the liquid ammonia The outlet on the top of the ammonia tank 1 is connected to the inlet in the middle of the ammonia deoiling device 2, the outlet on the top of the ammonia deoiling device 2 is connected to the inlet in the middle of the ammonia degranulation device 3, and the outlet on the top of the ammonia degranulation device 3 Connected with the inlet of the ammonia gas distributor 43, the interior of the ammonia absorber 4 is divided into a first chamber 41 and a second chamber 42, the bottom of the first chamber 41 communicates with the bottom of the second chamber 42, the first The chamber 41 is provided with an ammonia distributor 43 and a first cooling pipe 44, the second...

Embodiment 2

[0027] The preparation method of ultra-clean and high-purity ammonia water includes the following specific steps: vaporizing liquid ammonia above first-class product; using an ammonia gas deoiling device 2 to carry out deoiling treatment on the vaporized ammonia gas to remove the oil in the ammonia gas ; Use the ammonia degranulation device 3 to remove the particles in the ammonia; the high-purity ammonia that has removed the particles is passed into the ammonia absorber, absorbed by deionized water, through the first cooling pipe 44 and the second cooling pipe 45 Cool to obtain ultra-clean and high-purity ammonia water.

[0028] The temperature of the ammonia water in the ammonia absorber 4 is 0-20° C., the pressure of the ammonia water in the ammonia absorber 4 is 0-0.1 MPa, and the ammonia water absorption time in the ammonia absorber 4 is 0.1-0.2 h.

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Abstract

The invention relates to a high-purity ammonium hydroxide absorption device and technology, and discloses an ammonia absorption device formed by high-purity materials. The high-purity ammonium hydroxide absorption device comprises a liquid ammonia tank, an ammonia gas deoiling device, an ammonia gas degranulation device, an ammonia absorption device and an ultra-clean high-purity ammonium hydroxide storage tank which are sequentially connected. The invention further discloses a method for preparing the ultra-clean high-purity ammonium hydroxide. The ammonia absorption device and the method for preparing the ultra-clean high-purity ammonium hydroxide have the advantages that the ultra-clean high-purity ammonium hydroxide can be prepared, the device is simple in structure, the number of needed processing procedures is small, the absorption is fast, the yield is high, the energy is saved, the efficiency is high, three wastes cannot be discharged, the requirement for environmental protection is met, the demand for industry large-scale manufacturing is met, and the device has good application value.

Description

technical field [0001] The invention relates to a high-purity ammonia water absorption device and a process, in particular to an ammonia absorption device constructed of high-purity materials and a process for preparing ultra-clean high-purity ammonia water using the device. Background technique [0002] Electronic chemicals are special chemical materials for the electronics industry, with high quality requirements. At the same time, electronic chemicals also have the characteristics of fast product replacement and high return on investment. In terms of technology, the United States, Germany, Japan and Taiwan have completed laboratory research and started large-scale production of ultra-clean and high-purity reagents for 0.2-0.6 μm technology and ultra-clean and high-purity reagents for 0.09-0.2 μm technology. The production capacity of domestic ultra-pure chemicals cannot meet the development needs of the domestic IC industry. This is extremely disproportionate to my count...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01C1/02
CPCY02P20/50
Inventor 冯烈许振良陈云斌魏永明刘询马晓华张金霞顾斯文
Owner ZHEJIANG JIANYE CHEM
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