Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Purity evaluation device for electronic-grade trichlorosilane

A trichlorosilane and evaluation device technology, applied in the direction of measuring devices, silicon compounds, instruments, etc., can solve the problems of low precision, long detection cycle, and the danger of trichlorosilane, and achieve safe operation, simple structure, low cost effect

Active Publication Date: 2013-12-18
青海黄河上游水电开发有限责任公司新能源分公司 +1
View PDF4 Cites 1 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This method not only has a long detection cycle and low precision, but also trichlorosilane is dangerous. Therefore, in order to obtain electronic grade trichlorosilane and produce electronic grade polysilicon, a fast, safe and accurate evaluation of trichlorosilane is urgently needed. silicon device

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Purity evaluation device for electronic-grade trichlorosilane

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0016] Such as figure 1 Shown, a kind of electronic grade trichlorosilane purity evaluation device, this device comprises chassis 6 and is placed on the bell jar 3 with cooling water jacket on chassis 6, is placed in the bell jar 3 with cooling water jacket The inner tantalum wire 5 and a pair of electrodes 8 passing through the chassis 6 and connected to the power supply. The top of the bell jar 3 with a cooling water jacket is provided with lifting lugs 1 and the bell jar cooling water outlet 2 respectively, and its side walls are respectively provided with a bell jar cooling water inlet 10 and a mirror 11; a pair of electrodes 8 pass through The tantalum wire 5 is connected together; a pair of electrodes 8 are respectively provided with a reaction gas inlet pipe port 7 and a reaction gas outlet pipe port 9, and the reaction gas inlet pipe port 7 and the reaction gas outlet pipe port 9 pass through the chassis 6 and the belt The 3 cavities of the bell jar with the cooling w...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention relates to a purity evaluation device for electronic-grade trichlorosilane. The device comprises a chassis, a bell-jar, which is arranged on the chassis and has a cooling water jacket, a tantalum filament, which is arranged in the bell-jar with the cooling water jacket, and a pair of electrodes, which go through the chassis and are connected to the power supply. The top part of the bell-jar with the cooling water jacket is provided with a hanger and a bell-jar cooling water outlet, the side wall of the bell-jar with the cooling water jacket is provided with a bell-jar cooling water inlet and a sight glass; the two electrodes are connected through the tantalum filament, the outside of the pair of electrodes is provided with a reaction gas inlet and a reaction gas outlet, and the reaction gas inlet and the reaction gas outlet go through the chassis and communicate with the cavity of the bell-jar with the cooling water jacket. The purity evaluation device for electronic-grade trichlorosilane has the advantages of simple structure and low cost, achieves the goals of rapid and precise purity measurement, and realizes safety operation.

Description

technical field [0001] The invention relates to a trichlorosilane evaluation device in the technical field of polysilicon, in particular to an electronic-grade trichlorosilane purity evaluation device. Background technique [0002] The main production process of polysilicon is the improved Siemens method, which relies on the chemical vapor deposition reaction of trichlorosilane and hydrogen in the reduction furnace to generate polysilicon. The purity of trichlorosilane directly determines the purity of polysilicon. The purity of trichlorosilane mainly relies on a series of rectification towers for purification. By controlling the operating parameters of each rectification tower, relatively pure trichlorosilane is finally obtained. By analyzing the purity of trichlorosilane components in trichlorosilane, C, O, P, B, metal content and minority carrier life are analyzed, and the operating parameters of the rectification tower with different functions are adjusted. [0003] At...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
IPC IPC(8): G01N33/00C01B33/035
Inventor 刘柏年王秉琳刘刚马波武春青李学峰李春松
Owner 青海黄河上游水电开发有限责任公司新能源分公司
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com