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Nano-metal spiral shaft-cone probe needle

A nano-metal and helical shaft technology, applied in the field of optics and optoelectronics, can solve the problems that are difficult to further improve and the spatial resolution is limited, and achieve the effect of manipulating and screening and improving sensitivity

Inactive Publication Date: 2015-07-15
NANKAI UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] On the other hand, using a planar metal helical structure, a vector field with rotation characteristics can be obtained in the far field. However, the size of the focal spot obtained by this method is hundreds of nanometers, and its spatial resolution is limited, so it is difficult to further improve

Method used

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  • Nano-metal spiral shaft-cone probe needle

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Embodiment 1

[0019] like figure 1 As shown, the near-field nano-metal helical axicon probe with high spatial resolution and high sensitivity provided by the present invention is composed of a nano-metal conical structure and a helical structure, and its structural equation in the cylindrical coordinate system for:

[0020]

[0021] in: and are the radius and angle in cylindrical coordinates, where: and are the radius and angle in the cylindrical coordinate system, is the preset height parameter, is the cone structure parameter factor, is the base radius, is the helical structure parameter factor, and The size is on the order of nanometers, and is a real number greater than 0, generally can take a positive integer, and on the order of hundreds of nanometers.

[0022] The manufacture of the nanometer metal helical axicon probe in the present invention can be realized by direct current magnetron sputtering against the target and focused ion beam etching technolog...

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Abstract

A nano-metal helical axicon probe with high spatial resolution, high sensitivity, and the ability to generate strong longitudinally polarized electric fields and rotating electric fields. The probe is composed of a nano-metallic cone structure and a helical structure. When the incident light (especially radially polarized light) illuminates the bottom surface of the nano-metal helical axicon probe, surface plasmons are excited at the edge of the bottom surface, and along the On the cone surface, the spiral groove on the cone surface propagates to the top, and continuously rotates, compresses and focuses, forming a nano-focused high local strong field at the top. The strong field has a large longitudinally polarized electric field component and has a rotational characteristic. In addition, by changing the structural parameter factors occupied by the conical structure and the helical structure, the control of the nano-focus field can be realized. The invention can be used as a probe for scanning probe microscopes such as scanning near-field microscopes and atomic force microscopes, and tip-enhanced Raman spectrometers, and has important application values ​​in many fields such as nano-sensing, nano-imaging, nano-lithography, and nano-manipulation.

Description

technical field [0001] The invention belongs to the field of optics and optoelectronic technology, and relates to nano-optoelectronic devices, surface plasmon excitation, nano-focusing and vector field, in particular to a metal photodetector with high spatial resolution, high sensitivity, and the ability to generate strong longitudinally polarized electric fields and rotating electric fields. Needle. Background technique [0002] Generating nanofocused strong fields with large longitudinally polarized electric field components is crucial for improving resolution and sensitivity in nanolithography, nanosensing, nanoimaging, and nanomanipulation. The use of surface plasmons generated and focused by various nanometal structures is an effective way to break through the traditional optical diffraction limit to achieve strong nanofocusing. The most commonly used one is the nano-metal axicon structure, which first converts the incident light energy into surface plasma waves, and ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01Q70/08G01Q70/10G01Q70/16G01N21/65
Inventor 匡登峰张德伦欧阳升
Owner NANKAI UNIV
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