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Silicon wafer fully-automatic feeding/discharging manipulator and movement trajectory control method thereof

A fully automatic technology for loading and unloading, applied in manipulators, program-controlled manipulators, manufacturing tools, etc., can solve problems such as low conversion efficiency, low flexibility, and high production costs

Active Publication Date: 2013-11-27
48TH RES INST OF CHINA ELECTRONICS TECH GROUP CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The technical problem to be solved by the present invention is to provide a fully automatic loading and unloading manipulator for silicon wafers and its motion track control method in view of the deficiencies of the existing technologies, so as to solve the problem that the loading and unloading systems of chain texturing, chain cleaning and sintering equipment take up a lot of space , complex mechanism, low flexibility, slow response, high production cost, large surface wear of silicon wafers, low conversion efficiency, and high fragmentation rate. It meets the needs of chain texturing, chain cleaning, and sintering equipment for loading and unloading tables. Fully automatic loading and unloading, laying the foundation for the full automation of the silicon wafer production line

Method used

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  • Silicon wafer fully-automatic feeding/discharging manipulator and movement trajectory control method thereof
  • Silicon wafer fully-automatic feeding/discharging manipulator and movement trajectory control method thereof
  • Silicon wafer fully-automatic feeding/discharging manipulator and movement trajectory control method thereof

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Embodiment Construction

[0030] Such as Figure 1-Figure 3 As shown, an embodiment of the present invention includes a mounting base 1, a shoulder joint 6, a large arm 7, a small arm 9, and a claw 11 for grabbing silicon wafers onto multi-channel solar cell processing equipment. 7 and the forearm 9 are connected through the elbow joint 10, the forearm 9 and the claw 11 are connected through the wrist joint 10, the shoulder joint 6 is installed on the installation base 1, and the motor is installed on the shoulder joint 6. seat 4, the motor mounting seat 4 is installed with a servo motor 3 that drives the motor mounting seat 4 to rotate around its own motor shaft relative to the mounting base 1, and the motor mounting seat 4 is also equipped with a servo motor that drives the arm 7 The first biaxial motor 5 that rotates around its own motor shaft relative to the motor mounting seat 4; the second biaxial motor 5 that drives the small arm 9 to rotate around its own motor shaft relative to the big arm 7 i...

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Abstract

The invention discloses a silicon wafer fully-automatic feeding / discharging manipulator and a movement trajectory control method thereof. The silicon wafer fully-automatic feeding / discharging manipulator and the movement trajectory control method thereof are used for fully-automatic feeding / discharging in multi-channel chain-type texturing, chain-type cleaning and sintering devices. The manipulator of the invention comprises a mounting base, a shoulder joint, a big arm, a small arm and a gripper used for gripping silicon wafers to multichannel solar battery sheet process equipment; the swing of the big arm and the small arm is controlled through a motor, and parametric design and PID control are adopted to realize concise control of the movement trajectory of the manipulator. With the silicon wafer fully-automatic feeding / discharging manipulator and the movement trajectory control method thereof of the invention adopted, problems such as large occupied space, complex mechanism, low flexibility, slow response and high production cost of chain-type texturing, chain-type cleaning and sintering devices as well as problems of serious wear of silicon wafer surface, low conversion efficiency and high fragmentation rate can be solved.

Description

technical field [0001] The invention relates to the field of solar photovoltaic equipment, in particular to a fully automatic loading and unloading manipulator for silicon wafers and a motion trajectory control method thereof, which are used for fully automatic loading and unloading of silicon wafers in chain texturing, chain cleaning and sintering equipment. Background technique [0002] The loading and unloading methods of multi-channel solar cell process equipment such as chain texturing, chain cleaning and sintering equipment are mostly completed by belt transmission. This equipment takes up a lot of space, has complex mechanisms, low flexibility, slow response, and high production costs. , and the surface of the silicon wafer is greatly worn during the transmission process, which reduces the conversion efficiency of the solar cell and causes a large number of debris, which increases the production cost. Contents of the invention [0003] The technical problem to be so...

Claims

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Application Information

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IPC IPC(8): H01L21/677H01L21/687H01L21/68H01L31/18B25J9/08B25J15/06
CPCY02P70/50
Inventor 刘良玉樊坤贾京英郭立
Owner 48TH RES INST OF CHINA ELECTRONICS TECH GROUP CORP
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